Insituspectroscopic ellipsometry study of the electron cyclotron resonance plasma oxidation of silicon and interfacial damage

1991 ◽  
Vol 59 (11) ◽  
pp. 1353-1355 ◽  
Author(s):  
Y. Z. Hu ◽  
J. Joseph ◽  
E. A. Irene
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Plasma Oxidation ◽  
Interfacial Damage ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals The Influence of Precleaning Process on the Gate Oxide Film Fabricated by Electron Cyclotron Resonance Plasma Oxidation

1997 ◽  
Vol 144 (1) ◽  
pp. 311-314 ◽  
Author(s):  
Kow‐Ming Chang ◽  
Chii‐Horng Li ◽  
Fu‐Jier Fahn ◽  
Jung‐Yu Tsai ◽  
Ta‐Hsun Yeh ◽  
...  
Keyword(s):  
Oxide Film ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Gate Oxide ◽  
Electron Cyclotron ◽  
Plasma Oxidation ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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