Measurements of the three‐dimensional impurity profile in Si using chemical etching and scanning tunneling microscopy
1998 ◽
Vol 05
(03n04)
◽
pp. 821-832
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2012 ◽
Vol 18
(4)
◽
pp. 885-891
◽
1991 ◽
Vol 9
(2)
◽
pp. 483
◽
Keyword(s):
1991 ◽
Keyword(s):