In situpatterning of contamination resists in metalorganic chemical vapor deposition for fabrication of quantum wires

T. Takahashi; Y. Arakawa; M. Nishioka

doi:10.1063/1.104874

In situpatterning of contamination resists in metalorganic chemical vapor deposition for fabrication of quantum wires

Applied Physics Letters ◽

10.1063/1.104874 ◽

1991 ◽

Vol 58 (21) ◽

pp. 2372-2374 ◽

Cited By ~ 5

Author(s):

T. Takahashi ◽

Y. Arakawa ◽

M. Nishioka

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Metalorganic Chemical

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InGaAs quantum wires grown by low pressure metalorganic chemical vapor deposition on InP V‐grooves

Applied Physics Letters ◽

10.1063/1.116649 ◽

1996 ◽

Vol 68 (25) ◽

pp. 3596-3598 ◽

Cited By ~ 34

Author(s):

M. Kappelt ◽

M. Grundmann ◽

A. Krost ◽

V. Türck ◽

D. Bimberg

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Low Pressure ◽

Metalorganic Chemical

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Structural and optical properties of m-plane GaN/AlGaN quantum wires grown by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.3639278 ◽

2011 ◽

Vol 99 (11) ◽

pp. 113106

Author(s):

Xuelin Yang ◽

Munetaka Arita ◽

Satoshi Kako ◽

Yasuhiko Arakawa

Keyword(s):

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Structural And Optical Properties ◽

Metalorganic Chemical

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GaAs/AlAs trench‐buried quantum wires with nearly rectangular cross sections grown by metalorganic chemical vapor deposition onV‐grooved substrates

Applied Physics Letters ◽

10.1063/1.111133 ◽

1994 ◽

Vol 64 (4) ◽

pp. 472-474 ◽

Cited By ~ 17

Author(s):

T. Sogawa ◽

S. Ando ◽

H. Kanbe

Keyword(s):

Chemical Vapor Deposition ◽

Cross Sections ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Metalorganic Chemical

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Vertically-stacked GaAs quantum wires grown on Si substrates by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91134-7 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 728-733 ◽

Cited By ~ 8

Author(s):

Y. Hasegawa ◽

T. Egawa ◽

T. Jimbo ◽

M. Umeno

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Si Substrates ◽

Metalorganic Chemical

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Growth of GaAs/AlAs trench‐buried multiple quantum wires by metalorganic chemical vapor deposition on V‐grooved substrates

Applied Physics Letters ◽

10.1063/1.111972 ◽

1994 ◽

Vol 64 (24) ◽

pp. 3299-3301 ◽

Cited By ~ 6

Author(s):

T. Sogawa ◽

S. Ando ◽

H. Kanbe

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Multiple Quantum ◽

Metalorganic Chemical

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Fabrication of GaAs arrowhead‐shaped quantum wires by metalorganic chemical vapor deposition selective growth

Applied Physics Letters ◽

10.1063/1.109614 ◽

1993 ◽

Vol 62 (1) ◽

pp. 49-51 ◽

Cited By ~ 55

Author(s):

S. Tsukamoto ◽

Y. Nagamune ◽

M. Nishioka ◽

Y. Arakawa

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Selective Growth ◽

Metalorganic Chemical

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Properties of the quantum wires grown on V‐grooved Al0.3Ga0.7As/GaAs substrate by atmospheric pressure metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.110255 ◽

1993 ◽

Vol 63 (22) ◽

pp. 3052-3054 ◽

Cited By ~ 15

Author(s):

Min‐Suk Lee ◽

Yong Kim ◽

Moo‐Song Kim ◽

Seong‐II Kim ◽

Suk‐Ki Min ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Atmospheric Pressure ◽

Gaas Substrate ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

Metalorganic Chemical

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GaAs/AlAs Trench-Buried Quantum Wires (<20 nm×20 nm) Fabricated by Metalorganic Chemical Vapor Deposition on Nonplanar Substrates

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.6224 ◽

1993 ◽

Vol 32 (Part 1, No. 12B) ◽

pp. 6224-6227 ◽

Cited By ~ 1

Author(s):

Tetsuomi Sogawa ◽

Seigo Ando ◽

Hiroshi Kanbe

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Quantum Wires ◽

Chemical Vapor ◽

20 Nm ◽

Metalorganic Chemical

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Growth behavior on V-grooved high Miller index GaAs substrates by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(94)00527-3 ◽

1995 ◽

Vol 146 (1-4) ◽

pp. 482-488 ◽

Cited By ~ 8

Author(s):

Moo-Sung Kim ◽

Yong Kim ◽

Min-Suk Lee ◽

Young Ju Park ◽

Seong-II Kim ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Growth Behavior ◽

Miller Index ◽

Gaas Substrates ◽

Metalorganic Chemical

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Structural and electrical properties of BaTiO3thin films grown onp‐InSb substrate by metalorganic chemical vapor deposition at low temperature

Applied Physics Letters ◽

10.1063/1.109550 ◽

1993 ◽

Vol 62 (15) ◽

pp. 1788-1790 ◽

Cited By ~ 16

Author(s):

T. W. Kim ◽

M. Jung ◽

H. J. Kim ◽

Y. S. Yoon ◽

W. N. Kang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Structural And Electrical Properties ◽

Metalorganic Chemical

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