Reflection high‐energy electron diffraction dynamics study of GaAs, AlAs, and Al0.5Ga0.5As layer growth under As4and/or As2molecular beam species

1990 ◽  
Vol 57 (20) ◽  
pp. 2107-2109 ◽  
Author(s):  
J. Y. Kim ◽  
D. Bassi ◽  
L. Jostad
1992 ◽  
Vol 275 ◽  
Author(s):  
V. S. Achutharaman ◽  
N. Chandrasekhar ◽  
A. M. Goldman

ABSTRACTIntensity oscillations of the specular reflection high energy electron diffraction (RHEED) beam contain useful information on the mode of growth and the evolving structure of thin films. We present RHEED studies of the growth of DyBa2Cu3O7−x films and DyBa2Cu3O7−x/DY2O3/DyBa2Cu3O7−x structures on SrTiO3; substrates deposited by ozone-assisted molecular beam epitaxy. The effect of substrate temperature, ozone flux and surface step densities on the epitaxial relationship and evolving microstructure will be discussed. The strong damping of the oscillations and identical time periods under different nuoleation and growth conditions suggest that the intensity oscillations are a consequence of to diffuse scattering from step edges rather than a layer-by-layer growth mode. It was also found that Dy2O3 can be used to fabricatee tri-layer type structures but not superlattice structures.


Author(s):  
L. -M. Peng ◽  
M. J. Whelan

In recent years there has been a trend in the structure determination of reconstructed surfaces to use high energy electron diffraction techniques, and to employ a kinematic approximation in analyzing the intensities of surface superlattice reflections. Experimentally this is motivated by the great success of the determination of the dimer adatom stacking fault (DAS) structure of the Si(111) 7 × 7 reconstructed surface.While in the case of transmission electron diffraction (TED) the validity of the kinematic approximation has been examined by using multislice calculations for Si and certain incident beam directions, far less has been done in the reflection high energy electron diffraction (RHEED) case. In this paper we aim to provide a thorough Bloch wave analysis of the various diffraction processes involved, and to set criteria on the validity for the kinematic analysis of the intensities of the surface superlattice reflections.The validity of the kinematic analysis, being common to both the TED and RHEED case, relies primarily on two underlying observations, namely (l)the surface superlattice scattering in the selvedge is kinematically dominating, and (2)the superlattice diffracted beams are uncoupled from the fundamental diffracted beams within the bulk.


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