Study of planarization of cobalt silicide lines and silicon surfaces by scanning force microscopy and scanning electron microscopy
1997 ◽
Vol 377-379
◽
pp. 1076-1081
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2000 ◽
Vol 129
(1)
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pp. 17-29
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2021 ◽
pp. 1759-1829
2008 ◽
Vol 391
(4)
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pp. 1351-1359
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1999 ◽
Vol 5
(6)
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pp. 413-419
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