THIN FILM COMPOSITIONAL ANALYSIS BY LOW-ENERGY ELECTRON-INDUCED X-RAY SPECTROMETRY (LEEIXS). NEW APPLICATIONS

1987 ◽  
Vol 48 (C9) ◽  
pp. C9-87-C9-90 ◽  
Author(s):  
M. ROMAND ◽  
M. CHARBONNIER ◽  
F. GAILLARD
Keyword(s):  
Thin Film ◽  
Compositional Analysis ◽  
Low Energy ◽  
Energy Electron ◽  
X Ray ◽  
Low Energy Electron ◽  
New Applications

Recent Developments in Surface and Thin Film Analysis using Low - Energy Electron Induced X-Ray Spectrometry (LEEIXS)

1991 ◽  
Vol 35 (B) ◽  
pp. 767-781 ◽  
Author(s):  
M.J. Romand ◽  
F. Gaillard ◽  
M. Charbonnier
Keyword(s):  
Thin Film ◽  
Film Deposition ◽  
Low Energy ◽  
Energy Electron ◽  
Emission Spectrometry ◽  
Film Analysis ◽  
Discharge System ◽  
X Ray ◽  
Thin Film Analysis ◽  
Low Energy Electron

AbstractA review is given of the main gas-discharge sources and auxiliary equipments which were used in soft and ultra-soft X-ray emission spectrometry. Special attention is paid to the basic principles and instrumentation of low-energy electron-induced X-ray spectrometry (LEEIXS) whose excitation source is an electron beam generated in a glow-discharge system. Capabilities of LEEIXS in surface and thin film analysis and characterization are illustrated by examples dealing with control and optimization of surface treatment and thin film deposition processes. Sensitivity of the technique down to the submonolayer range and influence of backscattering phenomena are shown.

X-ray and Low Energy Electron Induced Damage in Alkanethiolate Monolayers on Au-substrates

1997 ◽  
Vol 202 (Part_1_2) ◽  
pp. 263-272 ◽  
Author(s):  
B. Jäger ◽  
H. Schürmann ◽  
H. U. Müller ◽  
H.-J. Himmel ◽  
M. Neumann ◽  
...  
Keyword(s):  
Low Energy ◽  
Energy Electron ◽  
X Ray ◽  
Low Energy Electron
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