scholarly journals PULSED ELECTRON BEAM ANNEALING OF ARSENIC-IMPLANTATION DAMAGE IN SILICON

1982 ◽  
Vol 43 (C5) ◽  
pp. C5-411-C5-420 ◽  
Author(s):  
D. Barbier ◽  
A. Laugier ◽  
A. Cachard
2006 ◽  
Vol 132 ◽  
pp. 215-219 ◽  
Author(s):  
D. J. Brink ◽  
H. W. Kunert ◽  
J. B. Malherbe ◽  
J. Camassel

1979 ◽  
Vol 50 (2) ◽  
pp. 783-787 ◽  
Author(s):  
A. C. Greenwald ◽  
A. R. Kirkpatrick ◽  
R. G. Little ◽  
J. A. Minnucci

2012 ◽  
Vol 132 (11) ◽  
pp. 951-957
Author(s):  
Hiroki Kaneko ◽  
Yasushi Yamano ◽  
Shinichi Kobayashi ◽  
Yoshio Saito

2018 ◽  
Vol 24 (S1) ◽  
pp. 2002-2003 ◽  
Author(s):  
Elisah J. VandenBussche ◽  
David J. Flannigan

2016 ◽  
Author(s):  
Yuri Ivanov ◽  
Oleg Tolkachev ◽  
Maria Petyukevich ◽  
Anton Teresov ◽  
Olga Ivanova ◽  
...  

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