Role of the plasma composition at the surface on diamond growth

1998 ◽  
Vol 08 (PR7) ◽  
pp. Pr7-391-Pr7-399 ◽  
Author(s):  
S. Farhat ◽  
C. Findeling ◽  
F. Silva ◽  
K. Hassouni ◽  
A. Gicquel
Keyword(s):  
Diamond Growth ◽  
Plasma Composition

Diamond growth on thin Ti wafers via chemical vapor deposition

1995 ◽  
Vol 10 (11) ◽  
pp. 2685-2688 ◽  
Author(s):  
Qijin Chen ◽  
Zhangda Lin
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Titanium Substrate ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Diamond Growth ◽  
X Ray ◽  
Hot Filament ◽  
Insight Into

Diamond film was synthesized on thin Ti wafers (as thin as 40 μm) via hot filament chemical vapor deposition (HFCVD). The hydrogen embrittlement of the titanium substrate and the formation of a thick TiC interlayer were suppressed. A very low pressure (133 Pa) was employed to achieve high-density rapid nucleation and thus to suppress the formation of TiC. Oxygen was added to source gases to lower the growth temperature and therefore to slow down the hydrogenation of the thin Ti substrate. The role of the very low pressure during nucleation is discussed, providing insight into the nucleation mechanism of diamond on a titanium substrate. The as-grown diamond films were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and x-ray analysis.

scholarly journals Engineering quantum-coherent defects: The role of substrate miscut in chemical vapor deposition diamond growth

2020 ◽  
Vol 117 (19) ◽  
pp. 194001
Author(s):  
Simon A. Meynell ◽  
Claire A. McLellan ◽  
Lillian B. Hughes ◽  
Wenbo Wang ◽  
Tom E. Mates ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Diamond Growth ◽  
Chemical Vapor Deposition Diamond

Modification of Aliphatic Self-Assembled Monolayers by Free-Radical-Dominant Plasma:  The Role of the Plasma Composition

Langmuir ◽  
2004 ◽  
Vol 20 (23) ◽  
pp. 10093-10099 ◽  
Author(s):  
Chih-Chiang Weng ◽  
Jiunn-Der Liao ◽  
Yi-Te Wu ◽  
Ming-Chen Wang ◽  
Ruth Klauser ◽  
...  
Keyword(s):  
Free Radical ◽  
Self Assembled Monolayers ◽  
Plasma Composition ◽  
Assembled Monolayers ◽  
Self Assembled

scholarly journals Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films

RSC Advances ◽  
2020 ◽  
Vol 10 (46) ◽  
pp. 27357-27368 ◽  
Author(s):  
Saidjafarzoda Ilhom ◽  
Adnan Mohammad ◽  
Deepa Shukla ◽  
John Grasso ◽  
Brian G. Willis ◽  
...  
Keyword(s):  
Thin Films ◽  
Indium Nitride ◽  
Atomic Layer ◽  
Nitrogen Plasma ◽  
Plasma Composition ◽  
Cathode Plasma ◽  
Layer Deposition ◽  
Hydrogen Radicals ◽  
Crystal Phase Transformation

Hollow-cathode plasma-generated hydrogen radicals induce crystal phase transformation from h-InN to c-In2O3 during plasma-enhanced atomic layer deposition using trimethyl-indium and Ar/N2 plasma.

The role of boron atoms in heavily boron-doped semiconducting homoepitaxial diamond growth — Study of surface morphology

2007 ◽  
Vol 16 (2) ◽  
pp. 409-411 ◽  
Author(s):  
Norio Tokuda ◽  
Takeyasu Saito ◽  
Hitoshi Umezawa ◽  
Hideyo Okushi ◽  
Satoshi Yamasaki
Keyword(s):  
Surface Morphology ◽  
Diamond Growth ◽  
Growth Study ◽  
Boron Doped

scholarly journals On the Role of the Plasma Composition in the Magnetic Field Evolution in Plasma Opening Switches

2004 ◽  
Vol 32 (5) ◽  
pp. 1805-1811 ◽  
Author(s):  
D. Osin ◽  
R. Doron ◽  
R. Arad ◽  
K. Tsigutkin ◽  
A. Starobinets ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Plasma Composition ◽  
Field Evolution ◽  
The Magnetic Field

scholarly journals The role of C2 in nanocrystalline diamond growth

2004 ◽  
Vol 96 (11) ◽  
pp. 6724-6732 ◽  
Author(s):  
J. R. Rabeau ◽  
P. John ◽  
J. I.B. Wilson ◽  
Y. Fan
Keyword(s):  
Nanocrystalline Diamond ◽  
Diamond Growth

The Role of Heavy Hydrocarbons in Cvd Diamond Growth

1992 ◽  
Vol 270 ◽  
Author(s):  
Ching-Hsong Wu ◽  
T. J. Potter ◽  
M. A. Tamor
Keyword(s):  
Growth Rate ◽  
Cvd Diamond ◽  
Diamond Growth ◽  
Spectrometric Analysis ◽  
Heavy Hydrocarbons ◽  
Hot Filament Cvd ◽  
Hot Filament ◽  
Deposition Conditions

ABSTRACTA mass spectrometric analysis of heavy hydrocarbons (HHCs) during hot-filament CVD diamond growth was performed together with in situ monitoring of the growth rate. Many HHCs were detected and tentatively identified. Of all HHCs studied, only diacetylene shows good correlation with the diamond growth rate under various deposition conditions. Its possible role is discussed.

A One-Dimensional Stochastic Model of Diamond Growth

1995 ◽  
Vol 399 ◽  
Author(s):  
Michael Frenklach
Keyword(s):  
Critical Role ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Stochastic Simulations ◽  
Diamond Growth ◽  
Elementary Processes ◽  
One Dimensional ◽  
Surface Migration ◽  
Kinetic Rates

ABSTRACT(1+1)-dimensional stochastic simulations were performed representing elementary processes underlying chemical vapor deposition of diamond films. The results exhibit different growth regimes, depending on the values assigned to kinetic rates, and generally support the critical role of surface migration suggested earlier for the growth of diamond.

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