Feasibility of UV laser ablation inductively coupled plasma atomic emission spectrometry for depth profiling of glass materials

1994 ◽  
Vol 04 (C4) ◽  
pp. C4-712-C4-712
Author(s):  
M. DUCREUX ◽  
J. M. MERMET
Keyword(s):  
Laser Ablation ◽  
Inductively Coupled Plasma ◽  
Depth Profiling ◽  
Atomic Emission ◽  
Atomic Emission Spectrometry ◽  
Emission Spectrometry ◽  
Uv Laser ◽  
Plasma Atomic Emission ◽  
Plasma Atomic Emission Spectrometry ◽  
Inductively Coupled

Determination of Zr and Ti in 3-μm-Thick ZrTiN Ceramic Coating Using Laser Ablation Inductively Coupled Plasma Atomic Emission Spectrometry

1997 ◽  
Vol 51 (7) ◽  
pp. 1037-1041 ◽  
Author(s):  
Viktor Kanicky ◽  
Jan Musil ◽  
Jean-Michel Mermet
Keyword(s):  
Laser Ablation ◽  
Inductively Coupled Plasma ◽  
High Speed Steel ◽  
Atomic Emission ◽  
Ceramic Coatings ◽  
Atomic Emission Spectrometry ◽  
Emission Spectrometry ◽  
Plasma Atomic Emission ◽  
Plasma Atomic Emission Spectrometry ◽  
Inductively Coupled

Analysis of 3-μm-thick ZrN, TiN, and ZrTiN ceramic coatings on a high-speed steel substrate by laser ablation inductively coupled plasma atomic emission spectrometry (LA-ICP-AES) is described. A Nd:YAG laser was used in the Q-switched mode and operated at 355 nm and 5 mJ. Ablation patterns were obtained on the target surface by moving the ablation chamber with respect to the laser beam by means of an X-Y translator. Control of the depth of penetration was obtained by successively performing a limited number of cycles. Transient signals were obtained and their peak areas were used for the construction of calibration graphs based on the concentrations determined by energy-dispersive X-ray (EDX) analysis. An erosion rate of 0.1 μm per cycle was observed. Crater shape and depth, temporal behavior, and reproducibility of the signals are described.

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