scholarly journals Experimental and chemical kinetic study of silicon nitride via LPCVD at low temperature from disilane and ammonia

1993 ◽  
Vol 03 (C3) ◽  
pp. C3-395-C3-402
Author(s):  
R. HENDA ◽  
E. SCHEID ◽  
L. K. KOUASSI ◽  
J. SAMITIER ◽  
A. EL HASSANI
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Kinetic Study ◽  
Chemical Kinetic

Experimental and chemical kinetic study on the low temperature oxidation of 1,3-butadiene in a jet-stirred reactor

Fuel ◽  
2022 ◽  
Vol 315 ◽  
pp. 123168
Author(s):  
Geyuan Yin ◽  
Xin Lv ◽  
Erjiang Hu ◽  
Bo Xiao ◽  
Huixian Shen ◽  
...  
Keyword(s):  
Low Temperature ◽  
Kinetic Study ◽  
Chemical Kinetic ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Stirred Reactor

The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer

2015 ◽  
Vol 212 (12) ◽  
pp. 2785-2790 ◽  
Author(s):  
Woochool Jang ◽  
Heeyoung Jeon ◽  
Hyoseok Song ◽  
Honggi Kim ◽  
Jingyu Park ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Plasma Power

Low-temperature hydrolysis (oxidation) of plasma-deposited silicon nitride films

1989 ◽  
Vol 1 (2) ◽  
pp. 194-198 ◽  
Author(s):  
J. N. Chiang ◽  
S. G. Ghanayem ◽  
D. W. Hess
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Silicon Nitride Films

Low temperature densification of silicon nitride nanoglasses

1993 ◽  
Vol 3 (1-6) ◽  
pp. 518
Author(s):  
A. Pechenik ◽  
G.J. Piermarini ◽  
S.C. Danforth
Keyword(s):  
Silicon Nitride ◽  
Low Temperature

scholarly journals Low-temperature selective deposition of silicon on silicon nitride by time-modulated disilane flow and formation of silicon narrow wires

2001 ◽  
Vol 79 (4) ◽  
pp. 494-496 ◽  
Author(s):  
Shin Yokoyama ◽  
Kenji Ohba ◽  
Kensaku Kawamura ◽  
Toshiro Kidera ◽  
Anri Nakajima
Keyword(s):  
Silicon Nitride ◽  
Low Temperature ◽  
Selective Deposition
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