scholarly journals ELECTRONIC TRANSPORT PROPERTIES CHARACTERIZATION OF SILICON WAFERS BY MODULATED PHOTOREFLECTANCE

1991 ◽  
Vol 01 (C6) ◽  
pp. C6-277-C6-282 ◽  
Author(s):  
B. C. FORGET ◽  
D. FOURNIER
Keyword(s):  
Transport Properties ◽  
Electronic Transport ◽  
Silicon Wafers ◽  
Electronic Transport Properties ◽  
Properties Characterization

Accuracy of photocarrier radiometric measurement of electronic transport properties of ion-implanted silicon wafers

2004 ◽  
Vol 96 (1) ◽  
pp. 186-196 ◽  
Author(s):  
Bincheng Li ◽  
Derrick Shaughnessy ◽  
Andreas Mandelis ◽  
Jerias Batista ◽  
Jose Garcia
Keyword(s):  
Transport Properties ◽  
Electronic Transport ◽  
Silicon Wafers ◽  
Radiometric Measurement ◽  
Electronic Transport Properties ◽  
Ion Implanted
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