Analysis of fringing capacitance effect on the performance of micro‐electromechanical‐system‐based micromachined ultrasonic air transducer
2021 ◽
pp. 146134842098404
2020 ◽
Vol 12
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pp. 14095-14104
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Vol 29
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pp. 115007
2007 ◽
Vol 33
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pp. 86-94
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