Fabrication of black silicon via reactive ion etching through Cu micromask

2014 ◽  
Vol 9 (5) ◽  
pp. 325-327 ◽  
Author(s):  
Ye Jiang ◽  
Honglie Shen ◽  
Zhihao Yue ◽  
Wei Wang ◽  
Jiale Jin
Keyword(s):  
Reactive Ion Etching ◽  
Black Silicon ◽  
Ion Etching

Morphologies and optical properties of black silicon by room temperature reactive ion etching

2020 ◽  
Vol 131 ◽  
pp. 110973
Author(s):  
François Atteia ◽  
Judikaël Le Rouzo ◽  
Lou Denaix ◽  
David Duché ◽  
Gérard Berginc ◽  
...  
Keyword(s):  
Optical Properties ◽  
Room Temperature ◽  
Reactive Ion Etching ◽  
Black Silicon ◽  
Ion Etching

scholarly journals The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching

2014 ◽  
Vol 116 (17) ◽  
pp. 173503 ◽  
Author(s):  
Martin Steglich ◽  
Thomas Käsebier ◽  
Matthias Zilk ◽  
Thomas Pertsch ◽  
Ernst-Bernhard Kley ◽  
...  
Keyword(s):  
Optical Properties ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Black Silicon ◽  
Structural And Optical Properties ◽  
Ion Etching ◽  
Inductively Coupled

scholarly journals Influence of structure geometry on THz emission from Black Silicon surfaces fabricated by reactive ion etching

2017 ◽  
Vol 25 (6) ◽  
pp. 6604 ◽  
Author(s):  
Ulrike Blumröder ◽  
Matthias Zilk ◽  
Hannes Hempel ◽  
Patrick Hoyer ◽  
Thomas Pertsch ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Silicon Surfaces ◽  
Black Silicon ◽  
Ion Etching ◽  
Structure Geometry
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