scholarly journals Directional acoustic response of a silicon disc‐based microelectromechanical systems structure

2014 ◽  
Vol 9 (4) ◽  
pp. 276-279 ◽  
Author(s):  
David James Mackie ◽  
Joseph Curt Jackson ◽  
James Gordon Brown ◽  
Deepak Uttamchandani ◽  
James Frederick Charles Windmill
Keyword(s):  
Microelectromechanical Systems ◽  
Acoustic Response ◽  
Silicon Disc

Charge Trapping and Degradation Properties of PZT Thin Films for MEMS

1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell
Keyword(s):  
Thin Films ◽  
Loss Factor ◽  
High Field ◽  
Microelectromechanical Systems ◽  
Charge Trapping ◽  
Metal Organic ◽  
Electrical Reliability ◽  
Silicon Based ◽  
Degradation Properties ◽  
Organic Decomposition

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).

APPLICATION OF UNCONVENTIONAL METHODS FOR FREQUENCY ANALYSIS IN ACOUSTICS

Akustika ◽  
2020 ◽  
Vol 36 (36) ◽  
pp. 25-32
Author(s):  
Jaroslav Smutný ◽  
Dušan Janoštík ◽  
Viktor Nohál
Keyword(s):  
Fourier Transform ◽  
Discrete Fourier Transform ◽  
Frequency Analysis ◽  
Mathematical Analysis ◽  
Measured Data ◽  
Application Area ◽  
Acoustic Response ◽  
Recommendations For Practice ◽  
Unconventional Methods ◽  
Frequency Area

The goal of this study is to familiarize a wider professional public with not fully known procedures suitable for processing measured data in the frequency area. Described is the use of the so-called Multi-taper method to analyze the acoustic response. This transformation belongs to a group of nonparametric methods outgoing from discrete Fourier transform, and this study includes its mathematical analysis and description. In addition, the use of respective method in a specific application area and recommendations for practice are described.

Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation

2006 ◽  
Vol 4 ◽  
pp. 288-305
Author(s):  
A.B. Migranov
Keyword(s):  
Virtual Environment ◽  
Microelectromechanical Systems ◽  
Testing And Debugging ◽  
Development Perspective

The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.

Embedded Microelectromechanical Systems (MEMS) for Measuring Strain in Composites

2000 ◽  
Vol 19 (4) ◽  
pp. 268-277 ◽  
Author(s):  
CHARLES HAUTAMAKI ◽  
SHAYNE ZURN ◽  
SUSAN C. MANTELL ◽  
DENNIS L. POLLA
Keyword(s):  
Microelectromechanical Systems

scholarly journals Swirl–nozzle interaction experiment: quasi-steady model-based analysis

2021 ◽  
Vol 62 (8) ◽  
Author(s):  
Lionel Hirschberg ◽  
Friedrich Bake ◽  
Karsten Knobloch ◽  
Angelo Rudolphi ◽  
Sebastian Kruck ◽  
...  
Keyword(s):  
Mass Flow Rate ◽  
Mass Flow ◽  
Flow Rate ◽  
Acoustic Pressure ◽  
Quantitative Information ◽  
Acoustic Response ◽  
Flow Measurements ◽  
Flow Rate Change ◽  
Interaction Experiment ◽  
Swirl Stabilized Combustion

AbstractMeasurements of sound due to swirl–nozzle interaction are presented. In the experiment a swirl structure was generated by means of unsteady tangential injection into a steady swirl-free flow upstream from a choked convergent–divergent nozzle. Ingestion of swirl by the choked nozzle caused a mass-flow rate change, which resulted in a downstream-measured acoustic response. The downstream acoustic pressure was found to remain negative as long as the swirl is maintained and reflections from the open downstream pipe termination do not interfere. The amplitude of this initial acoustic response was found to be proportional to the square of the tangential mass-flow rate used to generate swirl. When the tangential injection valve was closed, the mass-flow rate through the nozzle increased, resulting in an increase of the downstream acoustic pressure. This increase in signal was compared to the prediction of an empirical quasi-steady model, constructed from steady-state flow measurements. As the opening time of the valve was varied, the signal due to swirl evacuation showed an initial overshoot with respect to quasi-steady behavior, after which it gradually decayed to quasi-steady behavior for tangential injection times long compared to the convection time in the pipe upstream of the nozzle. This demonstrates that the acoustic signal can be used to obtain quantitative information concerning the time dependence of the swirl in the system. This could be useful for understanding the dynamics of flow in engines with swirl-stabilized combustion. Graphic abstract

Design and optimization of local acoustic response in mid-frequency vibro-acoustic systems

2021 ◽  
Vol 181 ◽  
pp. 108177
Author(s):  
Yang Yu ◽  
Guozhong Zhao ◽  
Shanhong Ren ◽  
Yuming Li
Keyword(s):  
Acoustic Response ◽  
Design And Optimization

scholarly journals Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Anton Melnikov ◽  
Hermann A. G. Schenk ◽  
Jorge M. Monsalve ◽  
Franziska Wall ◽  
Michael Stolz ◽  
...  
Keyword(s):  
Finite Element ◽  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Dynamic Performance ◽  
Major Step ◽  
Element Analysis ◽  
Electrostatic Actuators ◽  
Voltage Range ◽  
Drive Voltage ◽  
Depth Analysis

AbstractElectrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.

Acoustic response of a rigid-frame porous medium plate with a periodic set of inclusions

2009 ◽  
Vol 126 (2) ◽  
pp. 685-693 ◽  
Author(s):  
J.-P. Groby ◽  
A. Wirgin ◽  
L. De Ryck ◽  
W. Lauriks ◽  
R. P. Gilbert ◽  
...  
Keyword(s):  
Porous Medium ◽  
Acoustic Response ◽  
Rigid Frame

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

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