A compact ultrafast capillary discharge for EUV projection lithography

2000 ◽  
Author(s):  
P. Choi
Keyword(s):  
Capillary Discharge ◽  
Projection Lithography

A Compact Ultrafast Capillary Discharge for EUV Projection Lithography

2000 ◽  
Vol 40 (1-2) ◽  
pp. 135-140 ◽  
Author(s):  
I. Krisch ◽  
P. Choi ◽  
J. Larour ◽  
M. Favre ◽  
J. Rous ◽  
...  
Keyword(s):  
Capillary Discharge ◽  
Projection Lithography

Application of Capillary Discharge Technique for Deposition of Diamond-Like Carbon Thin Films (2nd Report)

2013 ◽  
Vol 133 (5) ◽  
pp. 293-299
Author(s):  
Kiyotoshi Fujii ◽  
Etsuo Fujiwara ◽  
Masayoshi Shimizu ◽  
Shozo Inoue
Keyword(s):  
Thin Films ◽  
Capillary Discharge ◽  
Diamond Like Carbon ◽  
Carbon Thin Films

Excimer Projection Lithography at 193-nm Wavelength

1988 ◽  
Author(s):  
M. Rothschild ◽  
D. J. Ehrlich
Keyword(s):  
Projection Lithography ◽  
193 Nm

scholarly journals Radial density profile and stability of capillary discharge plasma waveguides of lengths up to 40 cm

2021 ◽  
Vol 9 ◽  
Author(s):  
M. Turner ◽  
A. J. Gonsalves ◽  
S. S. Bulanov ◽  
C. Benedetti ◽  
N. A. Bobrova ◽  
...  
Keyword(s):  
Laser Pulse ◽  
Electron Density ◽  
Density Profile ◽  
Pulse Propagation ◽  
Spot Size ◽  
Capillary Discharge ◽  
Electron Density Profile ◽  
Plasma Waveguide ◽  
Wakefield Acceleration ◽  
Plasma Wakefield

Abstract We measured the parameter reproducibility and radial electron density profile of capillary discharge waveguides with diameters of 650 $\mathrm{\mu} \mathrm{m}$ to 2 mm and lengths of 9 to 40 cm. To the best of the authors’ knowledge, 40 cm is the longest discharge capillary plasma waveguide to date. This length is important for $\ge$ 10 GeV electron energy gain in a single laser-driven plasma wakefield acceleration stage. Evaluation of waveguide parameter variations showed that their focusing strength was stable and reproducible to $<0.2$ % and their average on-axis plasma electron density to $<1$ %. These variations explain only a small fraction of laser-driven plasma wakefield acceleration electron bunch variations observed in experiments to date. Measurements of laser pulse centroid oscillations revealed that the radial channel profile rises faster than parabolic and is in excellent agreement with magnetohydrodynamic simulation results. We show that the effects of non-parabolic contributions on Gaussian pulse propagation were negligible when the pulse was approximately matched to the channel. However, they affected pulse propagation for a non-matched configuration in which the waveguide was used as a plasma telescope to change the focused laser pulse spot size.

Role of the wall ablation in the operation of a 46.9 nmAr capillary discharge soft x-ray laser

2003 ◽  
Vol 43 (2) ◽  
pp. 88-93 ◽  
Author(s):  
A. Ritucci ◽  
G. Tomassetti ◽  
A. Reale ◽  
L. Palladino ◽  
L. Reale ◽  
...  
Keyword(s):  
Capillary Discharge ◽  
X Ray

Development of data conversion system for electron beam projection lithography

2002 ◽  
Vol 20 (6) ◽  
pp. 2672 ◽  
Author(s):  
Kokoro Kato ◽  
Kuninori Nishizawa ◽  
Tamae Haruki ◽  
Tadao Inoue ◽  
Koichi Kamijo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Data Conversion ◽  
Projection Lithography ◽  
Conversion System ◽  
Beam Projection

Transient Radiative Heat Transfer from a Plasma Produced by a Capillary Discharge

2005 ◽  
Vol 19 (4) ◽  
pp. 572-580 ◽  
Author(s):  
Malay Das ◽  
Stefan T. Thynell ◽  
Jianquan Li ◽  
Thomas A. Litzinger
Keyword(s):  
Heat Transfer ◽  
Radiative Heat Transfer ◽  
Radiative Heat ◽  
Capillary Discharge

Characterization of AZ PN114 resist for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 7044 ◽  
Author(s):  
K. Early ◽  
D. M. Tennant ◽  
D. Y. Jeon ◽  
P. P. Mulgrew ◽  
A. A. MacDowell ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

New mask format for low-energy electron-beam proximity projection lithography

2002 ◽  
Author(s):  
Kaoru Koike ◽  
Shinji Omori ◽  
Kazuya Iwase ◽  
Isao Ashida ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron
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