Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines
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2011 ◽
Vol 356-360
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pp. 1109-1117
2019 ◽
Vol 1
(12)
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pp. 146-154
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2000 ◽
2012 ◽
Vol 482-484
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pp. 224-228
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2018 ◽
Vol 7
(4.38)
◽
pp. 1109
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2020 ◽
pp. 117-123