Micromachined chromium nitride thin-film pressure sensor for high temperature applications

2006 ◽  
Vol 42 (13) ◽  
pp. 754 ◽  
Author(s):  
G.S. Chung
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Pressure Sensor ◽  
Chromium Nitride ◽  
Film Pressure ◽  
Temperature Applications

A thin film pressure sensor with double sensitive units

2015 ◽  
Author(s):  
Hongqing Pan ◽  
Guangyu Hu ◽  
Pingguo Cao ◽  
Yubing Wang ◽  
Yunjian Ge ◽  
...  
Keyword(s):  
Thin Film ◽  
Pressure Sensor ◽  
Film Pressure

High temperature characterization of PZT(0.52/0.48) thin-film pressure sensors

2013 ◽  
Vol 24 (1) ◽  
pp. 015017 ◽  
Author(s):  
M Asadnia ◽  
A G P Kottapalli ◽  
J M Miao ◽  
A B Randles ◽  
A Sabbagh ◽  
...  
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Pressure Sensors ◽  
Film Pressure

322 A Study on the Development of Thin-Film Pressure Sensor

2001 ◽  
Vol 2001.9 (0) ◽  
pp. 137-138 ◽  
Author(s):  
Kazuyuki SEKINE ◽  
Yuji Mihara ◽  
Tsuneo Someya
Keyword(s):  
Thin Film ◽  
Pressure Sensor ◽  
Film Pressure

The Design and Simulation of Wide Range Pressure Sensor Based on HTCC for High-Temperature Applications

2014 ◽  
Vol 609-610 ◽  
pp. 1053-1059
Author(s):  
Zhong Ren ◽  
Qiu Lin Tan ◽  
Chen Li ◽  
Tao Luo ◽  
Ting Cai ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
Simulation Analysis ◽  
Zirconia Ceramic ◽  
Passive Measurement ◽  
Series Resonance ◽  
Wide Range ◽  
Spiral Inductors ◽  
Temperature Applications

A wide range pressure sensor is designed based on the theoretical basis of LC series resonance circuit model to realize the wireless passive measurement in the harsh environment, such as high temperature and high pressure. The capacitive pressure sensitive device is devised by the technology of high-temperature co-fired ceramics (HTCC) to form nine density cavities in zirconia ceramic substrates, and thick film technology to print capacitance plates and planar spiral inductors. The theoretical calculation and simulation analysis of the designed sensor are made respectively under high pressure (10MPa) and temperature (600 °C), the results of which verify the feasibility of the design in a wide range of pressure for high-temperature applications, and provide the reliable theory basis for the fabrication of wide range pressure sensor.

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