Low sidewall damage plasma etching using ICP-RIE with HBr chemistry of Si∕SiGe resonant interband tunnel diodes

2006 ◽  
Vol 42 (12) ◽  
pp. 719 ◽  
Author(s):  
S.-Y. Park ◽  
S.-Y. Chung ◽  
P.R. Berger ◽  
R. Yu ◽  
P.E. Thompson
1992 ◽  
Vol 13 (3) ◽  
pp. 155-157 ◽  
Author(s):  
A.G. MacDonald ◽  
L.V. Iogansen ◽  
D.J. Day ◽  
M. Sweeny ◽  
J. Xu

1992 ◽  
Vol 7 (8) ◽  
pp. 1097-1102 ◽  
Author(s):  
J M Xu ◽  
A G MacDonald ◽  
L V Iogansen ◽  
D J Day ◽  
M Sweeny

2001 ◽  
Vol 89 (10) ◽  
pp. 5791-5793 ◽  
Author(s):  
R. Magno ◽  
A. S. Bracker ◽  
B. R. Bennett

1999 ◽  
Vol 20 (7) ◽  
pp. 329-331 ◽  
Author(s):  
S.L. Rommel ◽  
T.E. Dillon ◽  
P.R. Berger ◽  
P.E. Thompson ◽  
K.D. Hobart ◽  
...  

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