Coplanar waveguide transmission lines and high Q inductors on CMOS grade silicon using photoresist and polyimide
Keyword(s):
High Q
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1989 ◽
Vol 37
(10)
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pp. 1612-1619
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Keyword(s):
Keyword(s):
Keyword(s):
1997 ◽
Vol 7
(2)
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pp. 2780-2783
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2006 ◽
Vol 16
(10)
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pp. 2183-2191
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