Increased carrier lifetimes in epitaxial silicon layers on buried silicon nitride produced by ion implantation

1984 ◽  
Vol 20 (10) ◽  
pp. 426 ◽  
Author(s):  
W Skorupa ◽  
U. Kreissig ◽  
E. Hensel ◽  
H. Bartsch
Keyword(s):  
Silicon Nitride ◽  
Ion Implantation ◽  
Epitaxial Silicon ◽  
Carrier Lifetimes

Properties of epitaxial silicon layers on buried silicon nitride produced by ion implantation

Vacuum ◽  
1986 ◽  
Vol 36 (11-12) ◽  
pp. 933-937 ◽  
Author(s):  
W Skorupa ◽  
U Kreissig ◽  
H Oertel ◽  
H Bartsch
Keyword(s):  
Silicon Nitride ◽  
Ion Implantation ◽  
Epitaxial Silicon

Kerfless epitaxial silicon wafers with 7 ms carrier lifetimes and a wide lift-off process window

2018 ◽  
Vol 57 (4) ◽  
pp. 041301 ◽  
Author(s):  
Catherin Gemmel ◽  
Jan Hensen ◽  
Lasse David ◽  
Sarah Kajari-Schröder ◽  
Rolf Brendel
Keyword(s):  
Silicon Wafers ◽  
Process Window ◽  
Epitaxial Silicon ◽  
Carrier Lifetimes ◽  
Lift Off

Electric conduction of silicon nitride induced by Si ion implantation

2000 ◽  
Vol 169 (1-4) ◽  
pp. 16-20 ◽  
Author(s):  
Masami Ikeyama ◽  
Setsuo Nakao ◽  
Hiroaki Niwa ◽  
Yoshiko Miyagawa ◽  
Soji Miyagawa ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Ion Implantation ◽  
Electric Conduction ◽  
Si Ion Implantation
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