Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography
Keyword(s):
Keyword(s):
1991 ◽
Keyword(s):
2018 ◽
Vol 25
(6)
◽
pp. 2259-2265
◽
2014 ◽
Vol 23
(5)
◽
pp. 1965-1979
◽
2014 ◽
Vol 538
◽
pp. 490-493
◽
2011 ◽
Vol 82
(3)
◽
pp. 033501
◽