Large enhancement of ferroelectric polarization in Hf0.5Zr0.5O2 films by low plasma energy pulsed laser deposition
Keyword(s):
The ferroelectric phase of HfO2 is generally stabilized in polycrystalline films, which typically exhibit the highest polarization when deposited using low oxidizing conditions. In contrast, epitaxial film grown by pulsed...
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2001 ◽
Vol 226-230
◽
pp. 809-811
◽
1993 ◽
Vol 51
◽
pp. 438-439
Keyword(s):
1998 ◽
Vol 08
(PR9)
◽
pp. Pr9-261-Pr9-264
Keyword(s):
2001 ◽
Vol 11
(PR11)
◽
pp. Pr11-65-Pr11-69