Amorphous AlN films grown by ALD from trimethylaluminum and monomethylhydrazine
Keyword(s):
The great interest in aluminium nitride thin films has been attributed to their excellent dielectric, thermal and mechanical properties. Here we present the results on amorphous AlN films obtained by...
2013 ◽
Vol 538
◽
pp. 316-319
◽
2006 ◽
Vol 91
(12)
◽
pp. 3026-3032
◽
2019 ◽
Vol 774
◽
pp. 848-855
◽
2019 ◽
Vol 2
(2)
◽
pp. 487-496
◽
Keyword(s):
1998 ◽
Vol 70
(2)
◽
pp. 273-285
◽
1999 ◽
Vol 17
(3)
◽
pp. 1045
◽
2002 ◽
Vol 124
(2)
◽
pp. 274-277
◽
Keyword(s):