Facile preparation of a cobalt diamine diketonate adduct as a potential vapor phase precursor for Co3O4films

2021 ◽  
Author(s):  
Max Klotzsche ◽  
Davide Barreca ◽  
Lorenzo Bigiani ◽  
Roberta Seraglia ◽  
Alberto Gasparotto ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
Phase Precursor ◽  
Facile Preparation

A novel heteroleptic Co(ii) complex has been synthesized, characterized and successfully evaluated as a precursor for the CVD of Co3O4 thin films with tailored properties.

Etching Mechanisms of SiO2 and SiNx:H Thin Films in HF/Ethanol Vapor Phase: Toward High Selectivity Batch Release Processes

2019 ◽  
Vol 28 (4) ◽  
pp. 717-723 ◽  
Author(s):  
S. Guillemin ◽  
P. Mumbauer ◽  
H. Radtke ◽  
M. Fimberger ◽  
S. Fink ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
High Selectivity ◽  
Ethanol Vapor ◽  
Batch Release ◽  
Release Processes

Residual and intentional n-type doping of ZnO thin films grown by metal-organic vapor phase epitaxy on sapphire and ZnO substrates

2014 ◽  
Vol 115 (11) ◽  
pp. 113508 ◽  
Author(s):  
Stéphane Brochen ◽  
Matthieu Lafossas ◽  
Ivan-Christophe Robin ◽  
Pierre Ferret ◽  
Frédérique Gemain ◽  
...  
Keyword(s):  
Thin Films ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Zno Thin Films ◽  
Organic Vapor ◽  
Metal Organic

scholarly journals Vapor deposition routes to conformal polymer thin films

2017 ◽  
Vol 8 ◽  
pp. 723-735 ◽  
Author(s):  
Priya Moni ◽  
Ahmed Al-Obeidi ◽  
Karen K Gleason
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Sample Preparation ◽  
Vapor Phase ◽  
Vapor Deposition ◽  
Imaging Techniques ◽  
Polymer Thin Films ◽  
Chemical Vapor ◽  
Short Review ◽  
Deposition Sample

Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.

Fabrication of a Peltier Device Based on InSb and SbTe Thin Films

2011 ◽  
Vol 254 ◽  
pp. 50-53 ◽  
Author(s):  
Tatsuya Ishii ◽  
Hideyuki Homma ◽  
Shigeo Yamaguchi
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Electron Beam ◽  
Vapor Phase ◽  
Electron Beam Evaporation ◽  
Peltier Effect ◽  
Insb Thin Films ◽  
Peltier Device ◽  
P Type ◽  
Direct Current Sputtering

We fabricated a thin film Peltier device based on an InSb film and a SbTe film. N-type InSb thin films were grown on sapphire (0001) substrate with InAsSb buffer layer by metalorganic vapor phase epitaxy, and P-type SbTe thin films were deposited on the substrate by electron beam evaporation. N-type and P-type films were separated on the substrate, and between them, a Au thin film was deposited by direct-current sputtering. We observed partial Peltier effect in the device.

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