scholarly journals Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy

2020 ◽  
Vol 8 (42) ◽  
pp. 14757-14765
Author(s):  
Lianjia Wu ◽  
Ivan Bespalov ◽  
Katharina Witte ◽  
Olivier Lugier ◽  
Jarich Haitjema ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
X Ray ◽  
Bond Dissociation ◽  
Fluorinated Ligands

A fluorinated ligand in an extreme ultraviolet hybrid photoresist yields C–F bond dissociation upon exposure, thus enhancing its overall sensitivity.

scholarly journals Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

2021 ◽  
Vol 127 (4) ◽  
Author(s):  
S. Skruszewicz ◽  
S. Fuchs ◽  
J. J. Abel ◽  
J. Nathanael ◽  
J. Reinhard ◽  
...  
Keyword(s):  
Optical Coherence Tomography ◽  
Near Infrared ◽  
Extreme Ultraviolet ◽  
Infrared Light ◽  
Imaging Method ◽  
Optical Coherence ◽  
Axial Resolution ◽  
Cross Sectional ◽  
X Ray ◽  
Broad Bandwidth

AbstractWe present an overview of recent results on optical coherence tomography with the use of extreme ultraviolet and soft X-ray radiation (XCT). XCT is a cross-sectional imaging method that has emerged as a derivative of optical coherence tomography (OCT). In contrast to OCT, which typically uses near-infrared light, XCT utilizes broad bandwidth extreme ultraviolet (XUV) and soft X-ray (SXR) radiation (Fuchs et al in Sci Rep 6:20658, 2016). As in OCT, XCT’s axial resolution only scales with the coherence length of the light source. Thus, an axial resolution down to the nanometer range can be achieved. This is an improvement of up to three orders of magnitude in comparison to OCT. XCT measures the reflected spectrum in a common-path interferometric setup to retrieve the axial structure of nanometer-sized samples. The technique has been demonstrated with broad bandwidth XUV/SXR radiation from synchrotron facilities and recently with compact laboratory-based laser-driven sources. Axial resolutions down to 2.2 nm have been achieved experimentally. XCT has potential applications in three-dimensional imaging of silicon-based semiconductors, lithography masks, and layered structures like XUV mirrors and solar cells.

scholarly journals Table-top extreme ultraviolet second harmonic generation

2021 ◽  
Vol 7 (21) ◽  
pp. eabe2265
Author(s):  
Tobias Helk ◽  
Emma Berger ◽  
Sasawat Jamnuch ◽  
Lars Hoffmann ◽  
Adeline Kabacinski ◽  
...  
Keyword(s):  
Second Harmonic Generation ◽  
Harmonic Generation ◽  
First Principles ◽  
Extreme Ultraviolet ◽  
Second Harmonic ◽  
High Harmonic ◽  
Electronic Structure Calculations ◽  
Free Electron Lasers ◽  
X Ray ◽  
Structure Calculations

The lack of available table-top extreme ultraviolet (XUV) sources with high enough fluxes and coherence properties has limited the availability of nonlinear XUV and x-ray spectroscopies to free-electron lasers (FELs). Here, we demonstrate second harmonic generation (SHG) on a table-top XUV source by observing SHG near the Ti M2,3 edge with a high-harmonic seeded soft x-ray laser. Furthermore, this experiment represents the first SHG experiment in the XUV. First-principles electronic structure calculations suggest the surface specificity and separate the observed signal into its resonant and nonresonant contributions. The realization of XUV-SHG on a table-top source opens up more accessible opportunities for the study of element-specific dynamics in multicomponent systems where surface, interfacial, and bulk-phase asymmetries play a driving role.

scholarly journals The X-ray and extreme-ultraviolet flux evolution of SS Cygni throughout outburst

2003 ◽  
Vol 345 (1) ◽  
pp. 49-61 ◽  
Author(s):  
Peter J. Wheatley ◽  
Christopher W. Mauche ◽  
Janet A. Mattei
Keyword(s):  
Extreme Ultraviolet ◽  
X Ray

scholarly journals The output of a laser amplifier with simultaneous amplified spontaneous emission and an injected seed

2009 ◽  
Vol 27 (3) ◽  
pp. 393-398 ◽  
Author(s):  
H. Huang ◽  
G.J. Tallents
Keyword(s):  
Spontaneous Emission ◽  
Extreme Ultraviolet ◽  
Amplified Spontaneous Emission ◽  
Gain Saturation ◽  
Free Electron Lasers ◽  
Laser Amplifier ◽  
One Dimensional ◽  
X Ray ◽  
Laser Amplifiers ◽  
Harmonic Radiation

AbstractThe minimum irradiance needed to overcome amplified spontaneous emission (ASE) of a seed beam injected into a laser amplifier is evaluated. The treatment is particularly applicable to extreme ultraviolet (EUV) and X-ray laser schemes to inject laser harmonic radiation as a seed into (1) plasma laser amplifiers and (2) free-electron lasers. Simple expressions and calculations are given for the minimum injected irradiance required for amplification of the injected seed beam to exceed ASE from the amplifier, including the effects of gain saturation, assuming one dimensional radiative transfer.

Thermal Design of Detector for the Solar X-Ray and Extreme Ultraviolet Imager

2019 ◽  
Vol 33 (2) ◽  
pp. 285-291
Author(s):  
Shijun Li ◽  
Liheng Chen ◽  
Yuhua Wu
Keyword(s):  
Extreme Ultraviolet ◽  
Thermal Design ◽  
X Ray
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