scholarly journals Phase identification of vanadium oxide thin films prepared by atomic layer deposition using X-ray absorption spectroscopy

RSC Advances ◽  
2020 ◽  
Vol 10 (44) ◽  
pp. 26588-26593
Author(s):  
Yejin Kim ◽  
Gwang Yeom Song ◽  
Raju Nandi ◽  
Jae Yu Cho ◽  
Jaeyeong Heo ◽  
...  

X-ray absorption spectroscopy reveals the local structures of atomic-layer-deposited vanadium oxide films subject to heat treatments.

2009 ◽  
Vol 106 (11) ◽  
pp. 113524 ◽  
Author(s):  
D. E. Proffit ◽  
D. B. Buchholz ◽  
R. P. H. Chang ◽  
M. J. Bedzyk ◽  
T. O. Mason ◽  
...  

RSC Advances ◽  
2013 ◽  
Vol 3 (4) ◽  
pp. 1179-1185 ◽  
Author(s):  
Timothee Blanquart ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
Mikko Heikkilä ◽  
...  

2009 ◽  
Vol 42 (6) ◽  
pp. 1158-1164 ◽  
Author(s):  
Narcizo M. Souza-Neto ◽  
Aline Y. Ramos ◽  
Hélio C. N. Tolentino ◽  
Alessandro Martins ◽  
Antonio D. Santos

A method of using X-ray absorption spectroscopy together with resolved grazing-incidence geometry for depth profiling of atomic, electronic or chemical local structures in thin films is presented. The quantitative deconvolution of thickness-dependent spectral features is performed by fully considering both scattering and absorption formalisms. Surface oxidation and local structural depth profiles in nanometric FePt films are determined, exemplifying the application of the method.


2014 ◽  
Vol 104 (24) ◽  
pp. 242113 ◽  
Author(s):  
Sin Cheng Siah ◽  
Sang Woon Lee ◽  
Yun Seog Lee ◽  
Jaeyeong Heo ◽  
Tomohiro Shibata ◽  
...  

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