Atomic layer deposition and characterization of vanadium oxide thin films

RSC Advances ◽  
2013 ◽  
Vol 3 (4) ◽  
pp. 1179-1185 ◽  
Author(s):  
Timothee Blanquart ◽  
Jaakko Niinistö ◽  
Marco Gavagnin ◽  
Valentino Longo ◽  
Mikko Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Vanadium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Vanadium Oxide Thin Films

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric

2008 ◽  
Vol 517 (1) ◽  
pp. 201-203 ◽  
Author(s):  
M. Roeckerath ◽  
T. Heeg ◽  
J.M.J. Lopes ◽  
J. Schubert ◽  
S. Mantl ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Gate Dielectric ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Lutetium Oxide ◽  
Layer Deposition

Atomic Layer Deposition and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films

2015 ◽  
Vol 21 (7-8-9) ◽  
pp. 181-187 ◽  
Author(s):  
Aile Tamm ◽  
Jekaterina Kozlova ◽  
Tõnis Arroval ◽  
Lauri Aarik ◽  
Peeter Ritslaid ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition

2018 ◽  
Vol 47 (11) ◽  
pp. 6709-6715 ◽  
Author(s):  
Tianjun Dai ◽  
Yixuan Ren ◽  
Lingxuan Qian ◽  
Xingzhao Liu
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Molybdenum Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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