Low-temperature supercritical dehydroxylation for achieving an ultra-low subthreshold swing of thin-film transistors

Nanoscale ◽  
2021 ◽  
Author(s):  
Kuan-Chang Chang ◽  
Luodan Hu ◽  
Kang Qi ◽  
Lei Li ◽  
Xinnan Lin ◽  
...  

Ultra-low subthreshold swing was achieved in fabricated double-layer high-k dielectric thin-film transistors by means of low temperature supercritical dehydroxylation methodology.

2020 ◽  
Vol 9 (2) ◽  
pp. 025002
Author(s):  
Ployrung Kesorn ◽  
Juan Paolo Bermundo ◽  
Toshiaki Nonaka ◽  
Mami N. Fujii ◽  
Yasuaki Ishikawa ◽  
...  

2019 ◽  
Vol 16 (9) ◽  
pp. 315-322 ◽  
Author(s):  
Henry J. H. Chen ◽  
Barry B. Yeh ◽  
Wei-Yang Chou

2013 ◽  
Vol 11 (8) ◽  
pp. 1509-1512 ◽  
Author(s):  
Dedong Han ◽  
Jian Cai ◽  
Wei Wang ◽  
Liangliang Wang ◽  
Yi Wang ◽  
...  

2011 ◽  
Vol 98 (12) ◽  
pp. 122101 ◽  
Author(s):  
Chia-Sheng Lin ◽  
Ying-Chung Chen ◽  
Ting-Chang Chang ◽  
Fu-Yen Jian ◽  
Hung-Wei Li ◽  
...  

2006 ◽  
Vol 26 (5-7) ◽  
pp. 1028-1031 ◽  
Author(s):  
Klaus Müller ◽  
Ioanna Paloumpa ◽  
Karsten Henkel ◽  
Dieter Schmeißer

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