scholarly journals Breaking the symmetry of nanosphere lithography with anisotropic plasma etching induced by temperature gradients

2021 ◽  
Author(s):  
Daniel Darvill ◽  
Marzia Iarossi ◽  
Ricardo M. Abraham Ekeroth ◽  
Aliaksandr Hubarevich ◽  
Jian-An Huang ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Nanosphere Lithography ◽  
Anisotropic Etching ◽  
Temperature Gradients ◽  
Anisotropic Plasma ◽  
Etching Process

A strongly anisotropic etching process mediated by temperature is presented to create nano mushroom arrays from a monolayer of spheres.

Performance enhancement of IPMC by anisotropic plasma etching process

2009 ◽  
Author(s):  
Seok Hwan Lee ◽  
Chul-Jin Kim ◽  
Hyun-Woo Hwang ◽  
Sung-Joo Kim ◽  
Hyun-Seok Yang ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Performance Enhancement ◽  
Anisotropic Plasma ◽  
Etching Process ◽  
Plasma Etching Process

Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks

2021 ◽  
pp. 1-7
Author(s):  
Hugo S. Alvarez ◽  
Frederico H. Cioldin ◽  
Audrey R. Silva ◽  
Luana C. J. Espinola ◽  
Alfredo R. Vaz ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Etching Process ◽  
Micro Channel ◽  
Plasma Etching Process

Understanding Anisotropic Plasma Etching of Two-Dimensional Polystyrene Opals for Advanced Materials Fabrication

Langmuir ◽  
2014 ◽  
Vol 30 (41) ◽  
pp. 12354-12361 ◽  
Author(s):  
Eser M. Akinoglu ◽  
Anthony J. Morfa ◽  
Michael Giersig
Keyword(s):  
Plasma Etching ◽  
Anisotropic Plasma ◽  
Advanced Materials ◽  
Two Dimensional

Characterization of the CH4/H2/Ar high density plasma etching process for HgCdTe

1999 ◽  
Vol 28 (4) ◽  
pp. 347-354 ◽  
Author(s):  
C. R. Eddy ◽  
D. Leonhardt ◽  
V. A. Shamamian ◽  
J. R. Meyer ◽  
C. A. Hoffman ◽  
...  
Keyword(s):  
Plasma Etching ◽  
High Density ◽  
Etching Process ◽  
Plasma Etching Process ◽  
Density Plasma

Fabrication of GaN nanorods by inductively coupled plasma etching via SiO2 nanosphere lithography

2009 ◽  
Vol 517 (14) ◽  
pp. 3859-3861 ◽  
Author(s):  
Byung-Jae Kim ◽  
Hyunjung Jung ◽  
Hong-Yeol Kim ◽  
Joona Bang ◽  
Jihyun Kim
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Nanosphere Lithography ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled
Sign in / Sign up

Export Citation Format

Share Document