Electrically active and hydrogen passivated Zn in GaAs/AlGaAs specifically distinguished during secondary ion mass spectrometry depth profiling

2021 ◽  
Author(s):  
Adrianna Wójcik ◽  
Walery Kolkowski ◽  
Iwona Pasternak ◽  
Włodzimierz Strupiński ◽  
Sylwia Kozdra ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Depth Profiles ◽  
Ion Mass Spectrometry ◽  
Novel Method ◽  
Secondary Ion

A novel method of measuring active and hydrogen-passivated (inactive) impurity depth profiles using Secondary Ion Mass Spectrometry.

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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