A correlative method to quantitatively image trace concentrations of elements by combined SIMS-EDX analysis
Keyword(s):
X Ray
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The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) images by using a synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS.
2016 ◽
Vol 31
(7)
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pp. 1472-1479
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2018 ◽
Vol 498
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pp. 348-354
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1984 ◽
Vol 80
(7)
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pp. 1903
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2011 ◽
Vol 29
(4)
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pp. 04D113
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2014 ◽
Vol 59
(2)
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pp. 173-180
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1994 ◽
Vol 12
(3)
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pp. 671-676
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