Inhibition of chemical interaction of molybdenum and silicon in a Mo/Si multilayer structure by the formation of intermediate compounds
In the present study, the formation of intermediate compounds in the Mo/Si multilayer was realized by the introduction of barrier layers at the interfaces.
2015 ◽
Vol 60
(6)
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pp. 511-520
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2018 ◽
Vol 11
(2)
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pp. 4036-4042
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2019 ◽
Vol 24
(34)
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pp. 4007-4012
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2020 ◽
Vol 17
(4)
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pp. 498-506
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