scholarly journals Morphology controlling of 〈111〉-3C–SiC films by HMDS flow rate in LCVD

RSC Advances ◽  
2019 ◽  
Vol 9 (5) ◽  
pp. 2426-2430 ◽  
Author(s):  
Qingfang Xu ◽  
Rong Tu ◽  
Qingyun Sun ◽  
Meijun Yang ◽  
Qizhong Li ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Flow Rate ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

Morphology of 〈111〉-oriented 3C–SiC films was transformed from mosaic to whisker to cauliflower-like with the increased flow rate (f) of hexametyldisilane (HMDS) in the process of laser chemical vapor deposition (LCVD).

High-Speed Preparation of - and -Oriented β-SiC Films by Laser Chemical Vapor Deposition

2013 ◽  
Vol 97 (3) ◽  
pp. 952-958 ◽  
Author(s):  
Song Zhang ◽  
Qingfang Xu ◽  
Rong Tu ◽  
Takashi Goto ◽  
Lianmeng Zhang
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
High Speed ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

On “how to start a fire”, or transverse forced-convection, hyperbaric laser chemical vapor deposition of fibers and textiles

2014 ◽  
Vol 84 (18) ◽  
pp. 1976-1986
Author(s):  
James L Maxwell ◽  
Nicholas Webb ◽  
Douglas Bradshaw ◽  
Marcie R Black ◽  
Karlene Maskaly ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Critical Temperature ◽  
Flow Velocity ◽  
Flow Rate ◽  
Growth Rates ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Forced Flow ◽  
Square Root ◽  
Laser Chemical Vapor Deposition

This work explores the transverse forced flow of precursor gases during hyperbaric pressure laser chemical vapor deposition (HP-LCVD). Axial and mass growth rates of carbon fibers are measured experimentally, and a numerical model is developed that provides fiber growth rates in both the mass-transport-limited (MTL) and kinetically limited (KL) regimes. It is found that the fiber’s transport-limited rate increases as the square root of the flow velocity, while simultaneously, the temperature drops with the inverse square root of the flow velocity. Growth is enhanced by forced flow so long as the reaction zone remains within the MTL regime; upon reaching a critical temperature and flow rate, however, fibers enter the KL regime, and the growth rate declines with rising flow rate. Molecular properties of the precursors employed and gas concentrations ultimately determine the range of the MTL and the locations of the critical temperature and flow rate. The growth rates of fibers can indeed be enhanced by transverse forced convection—to at least three times the zero-flow steady-state rate, provided an MTL regime exists. Complex three-dimensional structures may be grown from these fibers in a freeform manner, and the more rapidly such microstructures can be fabricated, the more practical HP-LCVD becomes for industrial use, including the fabrication of novel textiles.

Laser chemical vapor deposition of SiC films with CO2 laser

2010 ◽  
Vol 502 (1) ◽  
pp. 238-242 ◽  
Author(s):  
Kengo Fujie ◽  
Akihiko Ito ◽  
Rong Tu ◽  
Takashi Goto
Keyword(s):  
Chemical Vapor Deposition ◽  
Co2 Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films

Growth mechanism of porous 3C–SiC films prepared via laser chemical vapor deposition

2020 ◽  
Vol 46 (10) ◽  
pp. 16518-16523 ◽  
Author(s):  
Liuyi Cai ◽  
Qingfang Xu ◽  
Wenzhong Lu ◽  
Rong Tu ◽  
Takashi Goto ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Growth Mechanism ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Laser Chemical Vapor Deposition ◽  
Sic Films
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