scholarly journals Growth promotion of vertical graphene on SiO2/Si by Ar plasma process in plasma-enhanced chemical vapor deposition

RSC Advances ◽  
2018 ◽  
Vol 8 (34) ◽  
pp. 18757-18761 ◽  
Author(s):  
Yanping Sui ◽  
Zhiying Chen ◽  
Yanhui Zhang ◽  
Shike Hu ◽  
Yijian Liang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Plasma Treatment ◽  
Vapor Deposition ◽  
Growth Promotion ◽  
Chemical Vapor ◽  
Plasma Process ◽  
Ar Plasma

This study investigates the growth promotion of vertically oriented graphene in plasma-enhanced chemical vapor deposition through Ar plasma treatment.

scholarly journals Facile Functionalization via Plasma-Enhanced Chemical Vapor Deposition for the Effective Filtration of Oily Aerosol

Polymers ◽  
2019 ◽  
Vol 11 (9) ◽  
pp. 1490 ◽  
Author(s):  
Sanghyun Roh ◽  
Sungmin Kim ◽  
Jooyoun Kim
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Filter Design ◽  
Chemical Vapor ◽  
Surface Modifications ◽  
Solid Particles ◽  
Oxygen Species ◽  
Plasma Process ◽  
Filter Performance ◽  
Filtration Performance

With the growing concern about the health impacts associated with airborne particles, there is a pressing need to design an effective filter device. The objective of this study is to investigate the effect of plasma-based surface modifications on static charges of electrospun filter media and their resulting filtration performance. Polystyrene (PS) electrospun web (ES) had inherent static charges of ~3.7 kV due to its electric field-driven process, displaying effective filtration performance. When oxygen species were created on the surface by the oxygen plasma process, static charges of electret media decreased, deteriorating the filter performance. When the web surface was fluorinated by the plasma-enhanced chemical vapor deposition (PECVD), the filtration efficiency against oily aerosol significantly increased due to the combined effect of decreased wettability and strong static charges (~−3.9 kV). Solid particles on the charged media formed dendrites as particles were attracted to other layers of particles, building up a pressure drop. The PECVD process is suggested as a facile functionalization method for effective filter design, particularly for capturing oily aerosol.

Improved biocompatibility of parylene-C films prepared by chemical vapor deposition and the subsequent plasma treatment

2009 ◽  
Vol 112 (6) ◽  
pp. 3677-3685 ◽  
Author(s):  
Jeom Sik Song ◽  
Sukmin Lee ◽  
Seong Hee Jung ◽  
Gook Chan Cha ◽  
Mu Seong Mun
Keyword(s):  
Chemical Vapor Deposition ◽  
Plasma Treatment ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Parylene C
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