Gallium, neon and helium focused ion beam milling of thin films demonstrated for polymeric materials: study of implantation artifacts

Nanoscale ◽  
2019 ◽  
Vol 11 (3) ◽  
pp. 1403-1409 ◽  
Author(s):  
Frances I. Allen ◽  
Nathan R. Velez ◽  
Rachel C. Thayer ◽  
Nipam H. Patel ◽  
Mary Ann Jones ◽  
...  
Keyword(s):  
Thin Films ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Polymeric Materials ◽  
Helium Ion ◽  
Focused Ion Beam Milling

The focused helium ion beam is ideally suited to precision milling of thin films avoiding implantation artifacts.

Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging

2012 ◽  
Vol 520 (6) ◽  
pp. 2073-2076 ◽  
Author(s):  
Xu Song ◽  
Kong Boon Yeap ◽  
Jing Zhu ◽  
Jonathan Belnoue ◽  
Marco Sebastiani ◽  
...  
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Focused Ion Beam ◽  
Stress Measurement ◽  
Ion Beam ◽  
Residual Stress Measurement ◽  
Focused Ion Beam Milling

Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling

2004 ◽  
Vol 237 (1-4) ◽  
pp. 627-631 ◽  
Author(s):  
L.W. Ma ◽  
J.M. Cairney ◽  
M.J. Hoffman ◽  
P.R. Munroe
Keyword(s):  
Thin Films ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Tin Thin Films ◽  
Focused Ion Beam Milling

Patterning of permalloy thin films by means of electron-beam lithography and focused ion-beam milling

2008 ◽  
Vol 44 (4-5) ◽  
pp. 699-704 ◽  
Author(s):  
S. Getlawi ◽  
M.R. Koblischka ◽  
U. Hartmann ◽  
C. Richter ◽  
T. Sulzbach
Keyword(s):  
Thin Films ◽  
Electron Beam ◽  
Electron Beam Lithography ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Permalloy Thin Films ◽  
Focused Ion Beam Milling

Characterisation of TiN and TiAlN thin films deposited on ground surfaces using focused ion beam milling

2004 ◽  
Vol 39 (11) ◽  
pp. 3569-3575 ◽  
Author(s):  
J. M. Cairney ◽  
S. G. Harris ◽  
L. W. Ma ◽  
P. R. Munroe ◽  
E. D. Doyle
Keyword(s):  
Thin Films ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

scholarly journals A streamlined workflow for automated cryo focused ion beam milling

2021 ◽  
pp. 107743
Author(s):  
Sebastian Tacke ◽  
Philipp Erdmann ◽  
Zhexin Wang ◽  
Sven Klumpe ◽  
Michael Grange ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

2012 ◽  
Vol 132 (1) ◽  
pp. 99-106
Author(s):  
Ying Dai ◽  
Lei Yang ◽  
Longhai Wang ◽  
Bin Tian ◽  
Lianying Zou ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Focused Ion Beam Milling

A study of angular effects in focused ion beam milling of water ice

2008 ◽  
Vol 18 (9) ◽  
pp. 095010 ◽  
Author(s):  
Jing Fu ◽  
Sanjay B Joshi ◽  
Jeffrey M Catchmark
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Water Ice ◽  
Focused Ion Beam Milling
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