Near interface ionic transport in oxygen vacancy stabilized cubic zirconium oxide thin films
2018 ◽
Vol 20
(41)
◽
pp. 26068-26071
◽
Keyword(s):
The cubic phase of pure zirconia (ZrO2) is stabilized in dense thin films through a controlled introduction of oxygen vacancies (O defects) by cold-plasma-based sputtering deposition.
Influence of reactive sputter deposition conditions on crystallization of zirconium oxide thin films
2009 ◽
Vol 27
(3)
◽
pp. 577-583
◽
Keyword(s):
2019 ◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 157
(10)
◽
pp. G193
◽
Keyword(s):
2007 ◽
Vol 316
(2)
◽
pp. 214-217
◽
Keyword(s):