The influence of precursor on rhenium incorporation into Re-doped MoS2 (Mo1−xRexS2) thin films by aerosol-assisted chemical vapour deposition (AACVD)
2017 ◽
Vol 5
(35)
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pp. 9044-9052
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Keyword(s):
The molecular precursors [Mo(S2CNEt2)4] (1), [Re(S2CC6H5)(S3CC6H5)2] (2), and [Re2(μ-S)2(S2CNEt2)4] (3) were used to deposit thin films of Re-doped MoS2.