Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
Growth per cycle as a function of process table temperature for both plasma-assisted (squares) and thermal (circles) ALD processes.
Keyword(s):
2015 ◽
Vol 3
(16)
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pp. 8450-8458
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Keyword(s):
2017 ◽
Vol 5
(1)
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pp. 330-338
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2008 ◽
Keyword(s):
2019 ◽