Efficient electrothermal actuation of liquid microlens arrays with low voltages

RSC Advances ◽  
2016 ◽  
Vol 6 (104) ◽  
pp. 102149-102154
Author(s):  
Wei Jiang ◽  
Hongzhong Liu ◽  
Shuya Zhu ◽  
Rui Li ◽  
Bangdao Chen ◽  
...  
Keyword(s):  
Microlens Array ◽  
Microlens Arrays ◽  
Electrothermal Actuation ◽  
Self Assembled

A self-assembled liquid microlens array with controllable focus by electrothermal actuation.

scholarly journals Self‐Assembled Nanorods and Microspheres for Functional Photonics: Retroreflector Meets Microlens Array

2021 ◽  
pp. 2002258
Author(s):  
Guang Chu ◽  
Feng Chen ◽  
Bin Zhao ◽  
Xue Zhang ◽  
Eyal Zussman ◽  
...  
Keyword(s):  
Microlens Array ◽  
Self Assembled

scholarly journals Fabrication of Multiscale-Structure Wafer-Level Microlens Array Mold

2019 ◽  
Vol 9 (3) ◽  
pp. 487 ◽  
Author(s):  
Shuping Xie ◽  
Xinjun Wan ◽  
Xiaoxiao Wei
Keyword(s):  
Low Cost ◽  
Form Factors ◽  
Cost Effective ◽  
Microlens Array ◽  
Practical Method ◽  
Reduced Form ◽  
Wafer Level ◽  
Polycrystalline Aluminum ◽  
Microlens Arrays ◽  
Multiscale Structure

The design and manufacture of cost-effective miniaturized optics at wafer level, usingadvanced semiconductor-like techniques, enables the production of reduced form-factor cameramodules for optical devices. However, suppressing the Fresnel reflection of wafer-level microlensesis a major challenge. Moth-eye nanostructures not only satisfy the antireflection requirementof microlens arrays, but also overcome the problem of coating fracture. This novel fabricationprocess, based on a precision wafer-level microlens array mold, is designed to meet the demandfor small form factors, high resolution, and cost effectiveness. In this study, three different kinds ofaluminum material, namely 6061-T6 aluminum alloy, high-purity polycrystalline aluminum, and purenanocrystalline aluminum were used to fabricate microlens array molds with uniform nanostructures.Of these three materials, the pure nanocrystalline aluminum microlens array mold exhibited auniform nanostructure and met the optical requirements. This study lays a solid foundation for theindustrial acceptation of novel and functional multiscale-structure wafer-level microlens arrays andprovides a practical method for the low-cost manufacture of large, high-quality wafer-level molds.

Microlens Array Fabrication by 3D Diffuser Lithography for Light Enhancement of Organic Light-Emitting Devices

2014 ◽  
Vol 625 ◽  
pp. 430-436
Author(s):  
Hung Yi Lin ◽  
Yong Shan Sun ◽  
Shih Liang Chen ◽  
Mao Kuo Wei
Keyword(s):  
Fill Factor ◽  
Microlens Array ◽  
Microlens Arrays ◽  
Light Emitting ◽  
Light Emitting Devices ◽  
Organic Light ◽  
Circular Holes ◽  
Organic Light Emitting Devices ◽  
Pdms Molding ◽  
Array Fabrication

Microlens arrays have been fabricated by 3D diffuser lithography in this study. The method mainly adopts two kinds of diffuser films with different transmittances and hazes, integrated by photolithography, polydimethylsiloxane (PDMS) molding and UV forming techniques, to get microlens arrays with different parameters and geometries. The features, such as height, geometry and fill factor of microlens arrays, are controlled by photolithography, using a photomask with circular holes and different exposure doses. The microlens arrays can also be duplicated and transferred to the surface of flexible polyethylene terephthalate (PET) substrate through PDMS molding and UV forming processes. Finally, the outcoupling efficiency of microlens arrays attached to organic light-emitting devices (OLEDs) can be measured and analyzed. More than 60% enhancement of luminous current efficiency can be obtained in experimental results.

Ethanol Induced Shape Recovery and Swelling in Poly(methyl methacrylate) and Applications in Fabrication of Microlens Array

2012 ◽  
Vol 77 ◽  
pp. 354-358 ◽  
Author(s):  
Yong Zhao ◽  
Chang Chun Wang ◽  
Wei Min Huang ◽  
Hendra Purnawali
Keyword(s):  
Methyl Methacrylate ◽  
Shape Recovery ◽  
Cost Effective ◽  
Microlens Array ◽  
Surface Patterning ◽  
The Other ◽  
Molecular Relaxation ◽  
Microlens Arrays ◽  
Poly Methyl Methacrylate ◽  
Effective Manner

The transportation phenomenon of ethanol in pre-deformed poly(methyl methacrylate) (PMMA) is systematically investigated. Two different phenomena simultaneously occur during this process. One is shape recovery, which is resulted from the ethanol induced softening and plasticization of PMMA. The other is swelling, which is produced by the ethanol induced molecular relaxation. Based on this study, a novel surface patterning method is proposed to fabricate PMMA microlens arrays in a simple and cost-effective manner.

Fabrication of Rolling Mold for a 200μm Microlens Array by 3D LIGA-Like Processes

2006 ◽  
Vol 505-507 ◽  
pp. 271-276 ◽  
Author(s):  
Jhy Cherng Tsai ◽  
Ken Liu ◽  
Hsi Harng Yang
Keyword(s):  
Stainless Steel ◽  
Stainless Steel Substrate ◽  
Steel Substrate ◽  
Three Dimensional ◽  
Microlens Array ◽  
Proof Of Concept ◽  
Microlens Arrays ◽  
Lithography Process ◽  
Array Pattern ◽  
Good Repeatability

This paper presents a series of three dimensional (3D) LIGA-like processes to fabricate microlens arrays on a cylindrical substrate. The processes consist of design of mask and rotating mechanism, coating of photoresist, 3D UV lithography, development and hardening, and electroforming. It transfers microlens array pattern to a φ76mm cylindrical stainless steel substrate intended for use as a rolling mold via electroforming. Process technologies are investigated and experiments are design and conducted as a proof of concept. Experimental results showed that φ200μm microlens arrays can be fabricated on the substrate with good repeatability. The microlens pattern transferred to the 100μm-thick film showed the feasibility and stability of the 3D lithography process.

Self-assembled Liquid Microlens Arrays activated by pyroelectric effect

2009 ◽  
Author(s):  
P. Ferraro ◽  
S. Grilli ◽  
L. Miccio ◽  
M. Paturzo ◽  
F. Merola ◽  
...  
Keyword(s):  
Microlens Arrays ◽  
Pyroelectric Effect ◽  
Self Assembled

LARGE AREA PARALLEL SURFACE NANOSTRUCTURING WITH LASER IRRADIATION THROUGH MICROLENS ARRAYS

2010 ◽  
Vol 17 (03) ◽  
pp. 383-387
Author(s):  
C. S. LIM ◽  
M. H. HONG ◽  
Y. LIN ◽  
L. S. TAN ◽  
A. SENTHIL KUMAR ◽  
...  
Keyword(s):  
Substrate Surface ◽  
Microlens Array ◽  
Laser Pulses ◽  
Polymer Materials ◽  
Direct Writing ◽  
Large Area ◽  
Microlens Arrays ◽  
Force Microscopy ◽  
Surface Nanostructuring ◽  
Parallel Surface

In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed.

scholarly journals Noncontact Microembossing Technology for Fabricating Thermoplastic Optical Polymer Microlens Array Sheets

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Xuefeng Chang ◽  
Dan Xie ◽  
Xiaohong Ge ◽  
Hui Li
Keyword(s):  
Mechanical Characteristics ◽  
Optical Glass ◽  
Low Cost ◽  
Microlens Array ◽  
Production Costs ◽  
Efficient Production ◽  
Promising Technique ◽  
Element Analysis ◽  
Microlens Arrays ◽  
Optical Polymer

Thermoplastic optical polymers have replaced traditional optical glass for many applications, due to their superior optical performance, mechanical characteristics, low cost, and efficient production process. This paper investigates noncontact microembossing technology used for producing microlens arrays made out of PMMA (polymethyl methacrylate), PS (polyStyrene), and PC (polycarbonate) from a quartz mold, with microhole arrays. An array of planoconvex microlenses are formed because of surface tension caused by applying pressure to the edge of a hole at a certain glass transition temperature. We studied the principle of noncontact microembossing techniques using finite element analysis, in addition to the thermal and mechanical properties of the three polymers. Then, the independently developed hot-embossing equipment was used to fabricate microlens arrays on PMMA, PS, and PC sheets. This is a promising technique for fabricating diverse thermoplastic optical polymer microlens array sheets, with a simple technological process and low production costs.

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