Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups
Keyword(s):
The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail.
2009 ◽
Vol 30
(12)
◽
pp. 2231-2240
◽
2020 ◽
Keyword(s):
2020 ◽
2020 ◽
Keyword(s):
2015 ◽
Vol 3
(15)
◽
pp. 3708-3713
◽
Keyword(s):