Large-scale freestanding nanometer-thick graphite pellicles for mass production of nanodevices beyond 10 nm
Keyword(s):
Freestanding nanometer-thick graphite film as a promising material for EUVL pellicle shows high thermal and chemical stability with excellent heat dissipation property.
2002 ◽
Vol 1599
(1-2)
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pp. 36-44
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Keyword(s):
1992 ◽
Vol 34
(3)
◽
pp. 183-191
◽
2013 ◽
Vol 2013
◽
pp. 1-5
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