Calibration methods in glow discharge optical emission spectroscopy: a tutorial review

2015 ◽  
Vol 30 (5) ◽  
pp. 1038-1049 ◽  
Author(s):  
Zdeněk Weiss
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Calibration Methods

Calibration methods used in glow discharge optical emission spectrometry are reviewed.

scholarly journals Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

2016 ◽  
Vol 31 (11) ◽  
pp. 2207-2212 ◽  
Author(s):  
C. Schubert ◽  
V. Hoffmann ◽  
A. Kümmel ◽  
J. Sinn ◽  
M. Härtel ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Depth Profiling ◽  
Optical Emission ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Diamond Like Carbon ◽  
Compositional Depth Profiling

This article describes the compositional depth profiling (CDP) of diamond-like carbon (DLC) layers by Glow Discharge-Optical Emission Spectrometry (GD-OES).

Quantitative Studies of Glow-Discharge Deposition Using Optical Emission Spectroscopy

1984 ◽  
Vol 38 ◽  
Author(s):  
F. J. Kampas
Keyword(s):  
Electrical Properties ◽  
Glow Discharge ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Secondary Electrons ◽  
Rf Discharges ◽  
Quantitative Studies ◽  
Glow Discharge Deposition

AbstractIntensities of CH optical emission and electrical properties of methane rf discharges as a function of pressure are presented and discussed. The results are consistent with a model in which the properties of the discharge are dominated by secondary electrons traversing the gap between the electrodes.

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