UV-light microscope: improvements in optical imaging for a secondary ion mass spectrometer
2015 ◽
Vol 30
(5)
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pp. 1207-1213
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Keyword(s):
Uv Light
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In situ analysis by secondary ion mass spectrometer (SIMS) and other in situ techniques requires accurate aiming of the sample surface at μm scale. Modification of the reflected-light microscope system of an IMS 1280 SIMS to use ultraviolet light illumination improved the optical resolution from 3.5 μm to 1.3 μm.