A quantum chemical study on gas phase decomposition pathways of triethylgallane (TEG, Ga(C2H5)3) and tert-butylphosphine (TBP, PH2(t-C4H9)) under MOVPE conditions
2014 ◽
Vol 16
(32)
◽
pp. 17018-17029
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Keyword(s):
Gas phase decomposition products of MOVPE precursor molecules TEG and TBP were identified via thermodynamic and kinetic data from a catalogue of 61 elementary reactions as calculated by quantum chemical methods.
2018 ◽
Vol 116
(14)
◽
pp. 1895-1907
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Keyword(s):
1995 ◽
Vol 60
(8)
◽
pp. 1310-1315
1984 ◽
Vol 49
(1)
◽
pp. 190-196
2015 ◽
Vol 85
(4)
◽
pp. 889-893
◽
2010 ◽
Vol 978
(1-3)
◽
pp. 41-47
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Keyword(s):
1982 ◽
Vol 86
(8)
◽
pp. 1327-1332
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