A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode

2014 ◽  
Vol 2 (1) ◽  
pp. 98-108 ◽  
Author(s):  
Yong-June Choi ◽  
Hyung-Ho Park
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Simple Approach ◽  
Growth Mode ◽  
Oxide Thin Films ◽  
Layer Deposition

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

2011 ◽  
Vol 4 (1) ◽  
pp. 268-272 ◽  
Author(s):  
A. Illiberi ◽  
F. Roozeboom ◽  
P. Poodt
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Iridium metal and iridium oxide thin films grown by atomic layer deposition at low temperatures

2011 ◽  
Vol 21 (41) ◽  
pp. 16488 ◽  
Author(s):  
Jani Hämäläinen ◽  
Timo Hatanpää ◽  
Esa Puukilainen ◽  
Timo Sajavaara ◽  
Mikko Ritala ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Iridium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

Broadband optical properties of aluminium zinc oxide thin films prepared by spatial atomic layer deposition

2018 ◽  
Vol 653 ◽  
pp. 267-273 ◽  
Author(s):  
Daniel B. Fullager ◽  
Glenn D. Boreman ◽  
Carolyn D. Ellinger ◽  
Tino Hofmann
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Transparent and conductive undoped zinc oxide thin films grown by atomic layer deposition

2010 ◽  
Vol 207 (7) ◽  
pp. 1568-1571 ◽  
Author(s):  
Grzegorz Luka ◽  
Tomasz Krajewski ◽  
Lukasz Wachnicki ◽  
Bartlomiej Witkowski ◽  
Elzbieta Lusakowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

1,5-Pentanediol as an Oxygen Precursor for Atomic Layer Deposition of Zinc Oxide Thin Films

2017 ◽  
Vol 29 (8) ◽  
pp. 3371-3374
Author(s):  
Seung-Joo Han ◽  
Seokhee Shin ◽  
Sungjoon Kim ◽  
Dong-Hyun Ko ◽  
Zhenyu Jin ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

2020 ◽  
Vol 217 (21) ◽  
pp. 2000319
Author(s):  
Taher Abu Ali ◽  
Julian Pilz ◽  
Philipp Schäffner ◽  
Markus Kratzer ◽  
Christian Teichert ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Piezoelectric Properties ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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