Dissociative electron attachment to Pt(PF3)4—a precursor for Focused Electron Beam Induced Processing (FEBIP)

2012 ◽  
Vol 14 (9) ◽  
pp. 2979-2982 ◽  
Author(s):  
Olivier May ◽  
Dušan Kubala ◽  
Michael Allan
2017 ◽  
Vol 8 (9) ◽  
pp. 5949-5952 ◽  
Author(s):  
Ragesh Kumar T P ◽  
Ragnar Bjornsson ◽  
Sven Barth ◽  
Oddur Ingólfsson

Dissociative electron attachment, 11 eV above the ionization energy of the focused electron beam induced deposition (FEBID) precursor HFeCo3(CO)12. A unique observation with potential significance for FEBID precursor design.


2017 ◽  
Vol 8 ◽  
pp. 2376-2388 ◽  
Author(s):  
Ragesh Kumar T P ◽  
Sangeetha Hari ◽  
Krishna K Damodaran ◽  
Oddur Ingólfsson ◽  
Cornelis W Hagen

We present first experiments on electron beam induced deposition of silacyclohexane (SCH) and dichlorosilacyclohexane (DCSCH) under a focused high-energy electron beam (FEBID). We compare the deposition dynamics observed when growing pillars of high aspect ratio from these compounds and we compare the proximity effect observed for these compounds. The two precursors show similar behaviour with regards to fragmentation through dissociative ionization in the gas phase under single-collision conditions. However, while DCSCH shows appreciable cross sections with regards to dissociative electron attachment, SCH is inert with respect to this process. We discuss our deposition experiments in context of the efficiency of these different electron-induced fragmentation processes. With regards to the deposition dynamics, we observe a substantially faster growth from DCSCH and a higher saturation diameter when growing pillars with high aspect ratio. However, both compounds show similar behaviour with regards to the proximity effect. With regards to the composition of the deposits, we observe that the C/Si ratio is similar for both compounds and in both cases close to the initial molecular stoichiometry. The oxygen content in the DCSCH deposits is about double that of the SCH deposits. Only marginal chlorine is observed in the deposits of from DCSCH. We discuss these observations in context of potential approaches for Si deposition.


2021 ◽  
Vol 4 (1) ◽  
Author(s):  
Xiao-Fei Gao ◽  
Jing-Chen Xie ◽  
Hao Li ◽  
Xin Meng ◽  
Yong Wu ◽  
...  

AbstractThe cyanide anion (CN−) has been identified in cometary coma, interstellar medium, planetary atmosphere and circumstellar envelopes, but its origin and abundance are still disputed. An isolated CN− is stabilized in the vibrational states up to ν = 17 of the electronic ground-state 1Σ+, but it is not thought to survive in the electronic or vibrational states above the electron autodetachment threshold, namely, in superexcited states. Here we report the direct observation of long-lived CN− yields of the dissociative electron attachment to cyanogen bromide (BrCN), and confirm that some of the CN− yields are distributed in the superexcited vibrational states ν ≥ 18 (1Σ+) or the superexcited electronic states 3Σ+ and 3Π. The triplet state can be accessed directly in the impulsive dissociation of BrCN− or by an intersystem transition from the superexcited vibrational states of CN−. The exceptional stability of CN− in the superexcited states profoundly influences its abundance and is potentially related to the production of other compounds in interstellar space.


1998 ◽  
Vol 102 (41) ◽  
pp. 8037-8043 ◽  
Author(s):  
Dal Colle ◽  
Giuseppe Distefano ◽  
Alberto Modelli ◽  
Derek Jones ◽  
Maurizio Guerra ◽  
...  

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