High refractive index and high transparency HfO2 nanocomposites for next generation lithography

2010 ◽  
Vol 20 (25) ◽  
pp. 5186 ◽  
Author(s):  
Woo Jin Bae ◽  
Markos Trikeriotis ◽  
Jing Sha ◽  
Evan L. Schwartz ◽  
Robert Rodriguez ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
High Transparency ◽  
Next Generation Lithography

scholarly journals High Refractive Index Fluid for Next Generation ArF Immersion Lithography

2006 ◽  
Vol 19 (5) ◽  
pp. 641-646 ◽  
Author(s):  
Taiichi Furukawa ◽  
Katsuhiko Hieda ◽  
Yong Wang ◽  
Takashi Miyamatsu ◽  
Kinji Yamada ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

High refractive index materials design for the next generation ArF immersion lithography

2008 ◽  
Author(s):  
Taiichi Furukawa ◽  
Takanori Kishida ◽  
Kyouyuu Yasuda ◽  
Tsutomu Shimokawa ◽  
Zhi Liu ◽  
...  
Keyword(s):  
Refractive Index ◽  
Materials Design ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

Poly(phenylene thioether)s with Fluorene-Based Cardo Structure toward High Transparency, High Refractive Index, and Low Birefringence

2016 ◽  
Vol 49 (16) ◽  
pp. 5849-5856 ◽  
Author(s):  
Kazuhiro Nakabayashi ◽  
Takayuki Imai ◽  
Mao-Chun Fu ◽  
Shinji Ando ◽  
Tomoya Higashihara ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
High Transparency

Multi-functional branched polysiloxanes polymers for high refractive index and flame retardant LED encapsulants

RSC Advances ◽  
2016 ◽  
Vol 6 (6) ◽  
pp. 4377-4381 ◽  
Author(s):  
Chih-Yuan Hsu ◽  
Wei-Gang Han ◽  
Shu-Jen Chiang ◽  
Wen-Chiung Su ◽  
Ying-Ling Liu
Keyword(s):  
Thermal Stability ◽  
Refractive Index ◽  
Thermal Resistance ◽  
Flame Retardant ◽  
Blue Light ◽  
High Refractive Index ◽  
High Transparency ◽  
Good Thermal Stability ◽  
Light Region ◽  
High Thermal Resistance

Multi-functional branched polysiloxanes exhibiting good thermal stability, high thermal resistance, self-extinguishing properties, high transparency at ultraviolet to blue light region, and relatively high RI value (1.59).

High-refractive-index fluids for the next-generation ArF immersion lithography

2006 ◽  
Author(s):  
Yong Wang ◽  
Takashi Miyamatsu ◽  
Taiichi Furukawa ◽  
Kinji Yamada ◽  
Tetsuo Tominaga ◽  
...  
Keyword(s):  
Refractive Index ◽  
High Refractive Index ◽  
Next Generation ◽  
Immersion Lithography

scholarly journals Fast Curable Polysiloxane-Silphenylene Hybrimer with High Transparency and Refractive Index for Optical Applications

Polymers ◽  
2021 ◽  
Vol 13 (4) ◽  
pp. 515
Author(s):  
Kyungkuk Koh ◽  
Honglae Sohn
Keyword(s):  
Refractive Index ◽  
Thermal Aging ◽  
Sol Gel ◽  
Optical Transmittance ◽  
High Refractive Index ◽  
Temperature Treatment ◽  
Pt Catalyst ◽  
High Temperature Treatment ◽  
High Transparency ◽  
Optical Applications

In this study, a fast curable polysiloxane-silphenylene hybrimer (PSH) was synthesized by the nonhydrolytic sol–gel condensation of phenyl-vinyl-oligosiloxane (PVO) and tris(dimethylhydrosilyl)benzene (TDMSB) under a Pt catalyst to investigate its optical property and thermal stability. The combination of PVO and tripod-type TDMSB results in a hybrimer with a fast curing time of 30 min. The PSH exhibited a high refractive index of 1.60, 1.59, and 1.58 at 450, 520, and 635 nm, respectively. High transmittance of 97% at 450 nm was obtained. The PSH exhibited a very high transmittance of 97% before thermal aging. The high optical transmittance of the PSH was only slightly decreased by 0.5% of the transmittance at 180 °C for 72 h after thermal aging, and high transparency was maintained almost constant even after 72 h of high-temperature treatment.

Accelerated Discovery of High-Refractive-Index Polyimides via First-Principles Molecular Modeling, Virtual High-Throughput Screening, and Data Mining

2019 ◽  
Author(s):  
Mohammad Atif Faiz Afzal ◽  
Mojtaba Haghighatlari ◽  
Sai Prasad Ganesh ◽  
Chong Cheng ◽  
Johannes Hachmann
Keyword(s):  
Data Mining ◽  
Refractive Index ◽  
High Throughput ◽  
First Principles ◽  
High Throughput Screening ◽  
Large Scale ◽  
Computational Study ◽  
High Refractive Index ◽  
Structural Features ◽  
Learning Program

<div>We present a high-throughput computational study to identify novel polyimides (PIs) with exceptional refractive index (RI) values for use as optic or optoelectronic materials. Our study utilizes an RI prediction protocol based on a combination of first-principles and data modeling developed in previous work, which we employ on a large-scale PI candidate library generated with the ChemLG code. We deploy the virtual screening software ChemHTPS to automate the assessment of this extensive pool of PI structures in order to determine the performance potential of each candidate. This rapid and efficient approach yields a number of highly promising leads compounds. Using the data mining and machine learning program package ChemML, we analyze the top candidates with respect to prevalent structural features and feature combinations that distinguish them from less promising ones. In particular, we explore the utility of various strategies that introduce highly polarizable moieties into the PI backbone to increase its RI yield. The derived insights provide a foundation for rational and targeted design that goes beyond traditional trial-and-error searches.</div>

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