Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes

R. M. Tiggelaar; J. W. Berenschot; J. H. de Boer; R. G. P. Sanders; J. G. E. Gardeniers; R. E. Oosterbroek; A. van den Berg; M. C. Elwenspoek

doi:10.1039/b414857f

Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes

Lab on a Chip ◽

10.1039/b414857f ◽

2005 ◽

Vol 5 (3) ◽

pp. 326 ◽

Cited By ~ 32

Author(s):

R. M. Tiggelaar ◽

J. W. Berenschot ◽

J. H. de Boer ◽

R. G. P. Sanders ◽

J. G. E. Gardeniers ◽

...

Keyword(s):

Thin Film ◽

High Temperature ◽

Silicon Nitride ◽

Fabrication And Characterization

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Fabrication and characterization of La0.8Sr0.2CrO3/In2O3 thin film thermocouple for high temperature sensing

Sensors and Actuators A Physical ◽

10.1016/j.sna.2018.08.024 ◽

2018 ◽

Vol 280 ◽

pp. 459-465 ◽

Cited By ~ 1

Author(s):

Dan Liu ◽

Peng Shi ◽

Wei Ren ◽

Yantao Liu ◽

Ming Liu ◽

...

Keyword(s):

Thin Film ◽

High Temperature ◽

Temperature Sensing ◽

Thin Film Thermocouple ◽

Fabrication And Characterization

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Fabrication and characterization of carbon nanotube–polyimide composite based high temperature flexible thin film piezoresistive strain sensor

Sensors and Actuators A Physical ◽

10.1016/j.sna.2013.05.023 ◽

2013 ◽

Vol 199 ◽

pp. 265-271 ◽

Cited By ~ 36

Author(s):

Yizhong Wang ◽

Allen X. Wang ◽

Ying Wang ◽

Minking K. Chyu ◽

Qing-Ming Wang

Keyword(s):

Thin Film ◽

High Temperature ◽

Carbon Nanotube ◽

Strain Sensor ◽

Fabrication And Characterization

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Design, fabrication and characterization of high temperature thin film heat flux sensors

Microelectronic Engineering ◽

10.1016/j.mee.2019.111128 ◽

2019 ◽

Vol 217 ◽

pp. 111128

Author(s):

Congchun Zhang ◽

Jianze Huang ◽

Juan Li ◽

Shenyong Yang ◽

Guifu Ding ◽

...

Keyword(s):

Thin Film ◽

Heat Flux ◽

High Temperature ◽

Heat Flux Sensors ◽

Fabrication And Characterization

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Fabrication and Characterization of Cadmium Telluride based thin Film Transistors

SOP Transactions on Applied Physics ◽

10.15764/aphy.2014.02009 ◽

2014 ◽

Vol 2014 (2) ◽

pp. 74-80

Author(s):

M. G. Mahesha ◽

Keyword(s):

Thin Film ◽

Cadmium Telluride ◽

Thin Film Transistors ◽

Fabrication And Characterization

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Fabrication and Characterization of LaGaO3 Thin Film Electrolyte Solid Oxide Fuel Cells with Sr2Fe1.5Mo0.5O6-δ Electrode

Current Physical Chemistry ◽

10.2174/187794680503160223164844 ◽

2016 ◽

Vol 5 (3) ◽

pp. 188-194

Author(s):

Jing Qian ◽

Lei Bi ◽

Wei Liu

Keyword(s):

Thin Film ◽

Fuel Cells ◽

Solid Oxide Fuel Cells ◽

Solid Oxide ◽

Oxide Fuel ◽

Thin Film Electrolyte ◽

Film Electrolyte ◽

Fabrication And Characterization

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Fabrication and characterization of Zn doped BaCe0.7Zr0.15Y0.15O3-δ thin film proton conducting materials for IT-SOFC

7th Brunei International Conference on Engineering and Technology 2018 (BICET 2018) ◽

10.1049/cp.2018.1521 ◽

2018 ◽

Author(s):

A. Afif ◽

A.K. Azad ◽

M. Biswas ◽

J. Zaini

Keyword(s):

Thin Film ◽

Proton Conducting ◽

Conducting Materials ◽

Fabrication And Characterization

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Fabrication and Characterization of Cross-linked Polybenzimidazole Based Membranes for High Temperature PEM Fuel Cells

Electrochimica Acta ◽

10.1016/j.electacta.2017.05.111 ◽

2017 ◽

Vol 245 ◽

pp. 1-13 ◽

Cited By ~ 36

Author(s):

Yağmur Özdemir ◽

Necati Özkan ◽

Yılser Devrim

Keyword(s):

Fuel Cells ◽

High Temperature ◽

Pem Fuel Cells ◽

Fabrication And Characterization ◽

High Temperature Pem

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Fabrication and characterization of silicon nitride nanopore

2013 6th International Conference on Biomedical Engineering and Informatics ◽

10.1109/bmei.2013.6746964 ◽

2013 ◽

Author(s):

Lingzhi Wu ◽

Hang Liu ◽

Yuqi Liu ◽

Hao Chen ◽

Quanjun Liu ◽

...

Keyword(s):

Silicon Nitride ◽

Fabrication And Characterization

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Fabrication and characterization of bismuth–telluride-based alloy thin film thermoelectric generators by flash evaporation method

Sensors and Actuators A Physical ◽

10.1016/j.sna.2007.05.030 ◽

2007 ◽

Vol 138 (2) ◽

pp. 329-334 ◽

Cited By ~ 132

Author(s):

M. Takashiri ◽

T. Shirakawa ◽

K. Miyazaki ◽

H. Tsukamoto

Keyword(s):

Thin Film ◽

Bismuth Telluride ◽

Alloy Thin Film ◽

Thermoelectric Generators ◽

Flash Evaporation ◽

Evaporation Method ◽

Fabrication And Characterization

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Silicon nitride as an effective protection against oxidation of a TiNi thin film in high temperature oxidizing air environment at atmospheric pressure

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1338552 ◽

2001 ◽

Vol 19 (1) ◽

pp. 305 ◽

Cited By ~ 2

Author(s):

I. Roch ◽

L. Buchaillot ◽

X. Wallart ◽

D. Collard

Keyword(s):

Thin Film ◽

High Temperature ◽

Silicon Nitride ◽

Atmospheric Pressure ◽

Effective Protection

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