scholarly journals A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
He Tian ◽  
Yi Shu ◽  
Xue-Feng Wang ◽  
Mohammad Ali Mohammad ◽  
Zhi Bie ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
High Sensitivity ◽  
Wide Pressure Range ◽  
Wide Pressure

Transparent Pressure Sensor with High Linearity over a Wide Pressure Range for 3D Touch Screen Applications

2020 ◽  
Vol 12 (14) ◽  
pp. 16691-16699 ◽  
Author(s):  
Han Byul Choi ◽  
Jinwon Oh ◽  
Youngsoo Kim ◽  
Mikhail Pyatykh ◽  
Jun Chang Yang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Touch Screen ◽  
High Linearity ◽  
Wide Pressure Range ◽  
Wide Pressure

scholarly journals Sea urchin-like microstructure pressure sensors with an ultra-broad range and high sensitivity

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Xiu-man Wang ◽  
Lu-qi Tao ◽  
Min Yuan ◽  
Ze-ping Wang ◽  
Jiabing Yu ◽  
...  
Keyword(s):  
Sea Urchin ◽  
Pressure Sensor ◽  
Pressure Range ◽  
Synergistic Effects ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Fast Response ◽  
Carbon Layer ◽  
Single Structure ◽  
Wide Pressure Range

AbstractSensitivity and pressure range are two significant parameters of pressure sensors. Existing pressure sensors have difficulty achieving both high sensitivity and a wide pressure range. Therefore, we propose a new pressure sensor with a ternary nanocomposite Fe2O3/C@SnO2. The sea urchin-like Fe2O3 structure promotes signal transduction and protects Fe2O3 needles from mechanical breaking, while the acetylene carbon black improves the conductivity of Fe2O3. Moreover, one part of the SnO2 nanoparticles adheres to the surfaces of Fe2O3 needles and forms Fe2O3/SnO2 heterostructures, while its other part disperses into the carbon layer to form SnO2@C structure. Collectively, the synergistic effects of the three structures (Fe2O3/C, Fe2O3/SnO2 and SnO2@C) improves on the limited pressure response range of a single structure. The experimental results demonstrate that the Fe2O3/C@SnO2 pressure sensor exhibits high sensitivity (680 kPa−1), fast response (10 ms), broad range (up to 150 kPa), and good reproducibility (over 3500 cycles under a pressure of 110 kPa), implying that the new pressure sensor has wide application prospects especially in wearable electronic devices and health monitoring.

scholarly journals Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications

2021 ◽  
Vol 11 (19) ◽  
pp. 9012
Author(s):  
Mengru Jiao ◽  
Minghao Wang ◽  
Ye Fan ◽  
Bangbang Guo ◽  
Bowen Ji ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Maximum Error ◽  
Anodic Bonding ◽  
Temperature Range ◽  
Wide Range ◽  
Wide Pressure Range ◽  
Bonding Technology ◽  
Protection Layer ◽  
Wide Pressure

In this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and temperature range (25–125 °C), the diaphragm thickness and the insulation of piezoresistors are precisely controlled by an optimized micromachining process. The consistency of the four piezoresistors is greatly improved by optimizing the structure of the ohmic contact pads. Furthermore, the probability of piezoresistive breakdown during anodic bonding is greatly reduced by conducting the top and bottom silicon of the SOI. At room temperature, the pressure sensor with 40 µm diaphragm demonstrates reliable linearity (0.48% F.S.) and sensitivity (33.04 mV/MPa) over a wide pressure range of 0–5.0 MPa. In addition, a polyimide protection layer is fabricated on the top surface of the sensor to prevent it from corrosion by a moist marine environment. To overcome the linearity drift due to temperature variation in practice, a digital temperature compensation system is developed for the pressure sensor, which shows a maximum error of 0.43% F.S. in a temperature range of 25–125 °C.

scholarly journals Sea Urchin-like Microstructures Pressure Sensors with Ultra-sensitivity and Super Working Range

2020 ◽  
Author(s):  
Xiu Wang ◽  
Lu-Qi Tao ◽  
Min Yuan ◽  
Ze-Ping Wang ◽  
Jiabing Yu ◽  
...  
Keyword(s):  
Sea Urchin ◽  
Pressure Sensor ◽  
Pressure Range ◽  
Sno2 Nanoparticles ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Fast Response ◽  
Carbon Layer ◽  
Single Structure ◽  
Wide Pressure Range

Abstract Sensitivity and pressure range are two significant parameters of pressure sensors. The existing pressure sensors are difficult to achieve both high sensitivity and a wide pressure range. In this regard, we proposed a new pressure sensor with a ternary nanocomposite Fe2O3/C@SnO2. Notably, the sea urchin-like Fe2O3 structure promoted signal transduction and protected Fe2O3 needles from mechanical breaking; while, acetylene carbon black improved the conductivity of Fe2O3. Moreover, one part of SnO2 nanoparticles adhered to the surface of Fe2O3 needles and formed Fe2O3/SnO2 heterostructures whereas its other part of nanoparticles dispersed into the carbon layer and formed SnO2@C structures. Collectively, the synergy of the three structures (Fe2O3/C, Fe2O3/SnO2 and SnO2@C) improved the limited pressure response range of a single structure. The experimental results demonstrated that the Fe2O3/C@SnO2 pressure sensor exhibits high sensitivity (680 kPa-1), fast response (10 ms), broad range (up to 150 kPa), and good reproducibility (over 3500 cycles under a pressure of 110 kPa). This implies that the new pressure sensor has wide application prospects especially in wearable electronic devices and health monitoring.

Ultrathin, Biocompatible, and Flexible Pressure Sensor with a Wide Pressure Range and Its Biomedical Application

ACS Sensors ◽  
2020 ◽  
Vol 5 (2) ◽  
pp. 481-489 ◽  
Author(s):  
Yongrok Jeong ◽  
Jaeho Park ◽  
Jinwoo Lee ◽  
Kyuyoung Kim ◽  
Inkyu Park
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Biomedical Application ◽  
Wide Pressure Range ◽  
Flexible Pressure Sensor ◽  
Wide Pressure

Study of physisorption isotherm of water on technical nickel surface with a wide pressure range

Vacuum ◽  
2017 ◽  
Vol 145 ◽  
pp. 123-127 ◽  
Author(s):  
Yanwu Li ◽  
Yongjun Cheng ◽  
Wenjun Sun ◽  
Yongjun Wang ◽  
Meng Dong ◽  
...  
Keyword(s):  
Pressure Range ◽  
Nickel Surface ◽  
Wide Pressure Range ◽  
Wide Pressure
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