Transparent Pressure Sensor with High Linearity over a Wide Pressure Range for 3D Touch Screen Applications

2020 ◽  
Vol 12 (14) ◽  
pp. 16691-16699 ◽  
Author(s):  
Han Byul Choi ◽  
Jinwon Oh ◽  
Youngsoo Kim ◽  
Mikhail Pyatykh ◽  
Jun Chang Yang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Touch Screen ◽  
High Linearity ◽  
Wide Pressure Range ◽  
Wide Pressure

scholarly journals A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
He Tian ◽  
Yi Shu ◽  
Xue-Feng Wang ◽  
Mohammad Ali Mohammad ◽  
Zhi Bie ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
High Sensitivity ◽  
Wide Pressure Range ◽  
Wide Pressure

scholarly journals Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications

2021 ◽  
Vol 11 (19) ◽  
pp. 9012
Author(s):  
Mengru Jiao ◽  
Minghao Wang ◽  
Ye Fan ◽  
Bangbang Guo ◽  
Bowen Ji ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Maximum Error ◽  
Anodic Bonding ◽  
Temperature Range ◽  
Wide Range ◽  
Wide Pressure Range ◽  
Bonding Technology ◽  
Protection Layer ◽  
Wide Pressure

In this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and temperature range (25–125 °C), the diaphragm thickness and the insulation of piezoresistors are precisely controlled by an optimized micromachining process. The consistency of the four piezoresistors is greatly improved by optimizing the structure of the ohmic contact pads. Furthermore, the probability of piezoresistive breakdown during anodic bonding is greatly reduced by conducting the top and bottom silicon of the SOI. At room temperature, the pressure sensor with 40 µm diaphragm demonstrates reliable linearity (0.48% F.S.) and sensitivity (33.04 mV/MPa) over a wide pressure range of 0–5.0 MPa. In addition, a polyimide protection layer is fabricated on the top surface of the sensor to prevent it from corrosion by a moist marine environment. To overcome the linearity drift due to temperature variation in practice, a digital temperature compensation system is developed for the pressure sensor, which shows a maximum error of 0.43% F.S. in a temperature range of 25–125 °C.

Ultrathin, Biocompatible, and Flexible Pressure Sensor with a Wide Pressure Range and Its Biomedical Application

ACS Sensors ◽  
2020 ◽  
Vol 5 (2) ◽  
pp. 481-489 ◽  
Author(s):  
Yongrok Jeong ◽  
Jaeho Park ◽  
Jinwoo Lee ◽  
Kyuyoung Kim ◽  
Inkyu Park
Keyword(s):  
Pressure Sensor ◽  
Pressure Range ◽  
Biomedical Application ◽  
Wide Pressure Range ◽  
Flexible Pressure Sensor ◽  
Wide Pressure

Study of physisorption isotherm of water on technical nickel surface with a wide pressure range

Vacuum ◽  
2017 ◽  
Vol 145 ◽  
pp. 123-127 ◽  
Author(s):  
Yanwu Li ◽  
Yongjun Cheng ◽  
Wenjun Sun ◽  
Yongjun Wang ◽  
Meng Dong ◽  
...  
Keyword(s):  
Pressure Range ◽  
Nickel Surface ◽  
Wide Pressure Range ◽  
Wide Pressure

Adsorption isotherms and kinetics of carbon dioxide on Chinese dry coal over a wide pressure range

Adsorption ◽  
2015 ◽  
Vol 21 (1-2) ◽  
pp. 53-65 ◽  
Author(s):  
Yongchen Song ◽  
Wanli Xing ◽  
Yi Zhang ◽  
Weiwei Jian ◽  
Zhaoyan Liu ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Adsorption Isotherms ◽  
Pressure Range ◽  
Adsorption Isotherms And Kinetics ◽  
Wide Pressure Range ◽  
Kinetics Of ◽  
Wide Pressure

Design and Simulation of Pressure Sensor for Ocean Depth Measurements

2013 ◽  
Vol 313-314 ◽  
pp. 666-670 ◽  
Author(s):  
K.J. Suja ◽  
Bhanu Pratap Chaudhary ◽  
Rama Komaragiri
Keyword(s):  
Pressure Sensor ◽  
Integrated Circuit ◽  
Output Voltage ◽  
Pressure Sensors ◽  
Micro Electro Mechanical System ◽  
Constant Thickness ◽  
Piezoresistive Pressure Sensor ◽  
Wide Pressure Range ◽  
Processing Techniques ◽  
Wide Pressure

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

Verteilung und Valenz der Kationen in Spinellsystemen mit Eisen und Chrom, II. Zur Stöchiometrie des Spinells FeCr2O4 / Distribution and Valence of the Cations in Spinel Systems with Iron and Chromium, II. On the Stoichiometry of the Spinel FeCr2O4

1991 ◽  
Vol 46 (5) ◽  
pp. 653-661 ◽  
Author(s):  
Andreas Eggert ◽  
Erwin Riedel
Keyword(s):  
Pressure Range ◽  
Total Iron ◽  
X Ray ◽  
Partial Pressures ◽  
Wide Pressure Range ◽  
Wide Pressure ◽  
Additional Phase

FeCr2O4 has been prepared under CO-CO2-atmosphere with oxygen partial pressures between 10-18 and 10-8 bar. X-Ray and Mößbauer investigations show that under higher pressures FeCr2O4 is not stoichiometric but contains Fe(III), and that corund type Cr2O3 as an additional phase has been formed. In the wide pressure range from 10-17 to 10-14 bar the contents of Fe(III) are lower than 1% of total iron, and the corund phase is negligible.

scholarly journals Quantitative gas composition analysis method for a wide pressure range up to atmospheric pressure—CO2 plasma case study

2020 ◽  
Vol 91 (11) ◽  
pp. 113501
Author(s):  
Ante Hecimovic ◽  
Federico D’Isa ◽  
Emile Carbone ◽  
Aleksander Drenik ◽  
Ursel Fantz
Keyword(s):  
Atmospheric Pressure ◽  
Pressure Range ◽  
Composition Analysis ◽  
Gas Composition ◽  
Analysis Method ◽  
Wide Pressure Range ◽  
Co2 Plasma ◽  
Wide Pressure
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